Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: -, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: -, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: -, CE Compliant: -

Series: Class 2, Valve Type: for Manifold N.C., Coil Voltage: 24VDC, Electrical Entry: Grommet, Orifice: ø2mm, Port Size: -, Thread: -, Insulator Material: -, Option: -

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override)

Symbol: 105R (Base Mounted, 3 Port, Universal), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override)

Symbol: Base Mounted, 3 Port, Universal, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: -, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: -, CE Compliant: -

Series: 30, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: -, CE Compliance: -

Series: 10, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: -, CE Compliance: -

Series: 20, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: -, CE Compliance: -

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): 0～70, End Locking: [Included] Presence, Valves: No, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: Without auto switch, Lead Wire Length(

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: Without auto switch, Lead Wire Length(m

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: Without auto switch, Lead Wire Length(