Part Number Description: HIGH VACUUM VALVE SPL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE SPL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE *LQA   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), Operating Temperature(°C): -, End Locking: No, Valves: No, Operating

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 3 Pcs., Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 500, Gripping Force (Open Side at 0.5 Mpa)(N): 525, Environment, Applications: Standard, Additional Function: Not Provided, Cylinder internal diameter(mm): 80, Auto switch: M9BA,

Added Function: N/A, Rod Motion: Double Acting Single Rod, Tube Material: Aluminum, Piston Packing Material: NBR, Stroke(mm): 80, Cushioning Mechanism: N/A, Support Type: Retainer Pin/Stopper Set, Standard: None, Nominal Pressure: 3.5MPa, Cylinder Type: Rectangular, Cylinder Nominal Designation Size(φ): 40, Rod Tip Shape: Female thread, Magnet for auto switches: Built-in, Switch: A93V, Lead

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), Operating Temperature(°C): -, End Locking: No, Valves: No, Operating

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