This is a legacy product, and replaced byZH07DSA-01-01-01, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, BE, ZH NOZZLE SIZE 0.7, .10463 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH07D?6/Rc 1 8?6/Rc 1 8?6/Rc 1 8

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way,3 Port Solenoid Valve NVZ Series

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

ZSE20(F)_ISE20

Nil Without lead wire M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts

EXxx-OMP0004CN

1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7

VEX-OMV0001

NPT 23 (R,NPT) Nm 1/8 35 1/4 812 3/8 1520 1/2 2025 3/4 2830 1 3638 11/4 4042 11/2 4850 2 4850 () 1 5 VEX-OMV0001 VEX1 Series / () 5 () 30 ( ) 6 VEX-OMV0001 VEX1 Series (904 ) 3.57 () (AF )(AMAFM ) ( ) 22 3 JIS C 3306 0.5mm () () IR2000 A VEX1 B33 VK300-82-1 ITV VY AC100V 100V VK300-82-2-01 AC110V 110V VK300-82-2-03 AC200V 200V VK300-82-2-02 AC220V 220V VK300-82-2-04 ) AC240V 240V

Series GS40 Digital Pressure Sensor 1

Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19

Series GS40 Digital Pressure Sensor 1

G Lead wire length Digital pressure sensor 0.6 m 5 m Nil X202 PPA A variety of installation options Screw includedM5, Mounting bracket M5 type only 8 1 R , 4 1 R Unit specifications AL With the unit switching function Note) Nil M Port size Fixed in SI unit (MPa) M5 (Female thread) R1/8 R1/4 M5 01 0 Note) With unit switching function is not permitted to sell for the domestic use in Japan,

CC-Link-E

RY0F H ol d out put pressure 1 Set dependi ng on t he dat a of RY00RY0B 0 Set pressure i m m edi at el y bef ore com m uni cat i on abnorm al i t y Set t i ng w hen f act ory i s shi pped 1 2 1 2 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 OFF OFF OFF OFF OFF OFF OFF OFF OFF OFF ON ON 7 Pressure set t i ng and out put m oni t ori ng Pressure set t i ng can be done by sendi ng i nput dat a usi

PSE530/200

Terminal DC (+) 4 3 2 1 IN (1 to 5 V) DC () N.C. Power supply/Output connector (8P) Power supply/Output connection cable (Included) Pin no. 8 Yellow : Auto shift input PIN no.

Made to Order Specifications:

Drain Series AFF Size Series AM, AMD, AMH Size 150 Series AFF Size Series AM, AMD, AMG, AMH Size Port size A B Connection A B 239 252 258 284 290 2B 80 1/4 , 3/8 1/8 , 1/4 , 3/8 450 550 650 850 256 260 300 300 349 380 496.5 11B 22B 37B 75B 240 3/4B, FF , 10K 1B, FF , 10K 1 B, FF , 10K 2B, FF , 10K 80 250 4B 1/2 1 2 3/8 , 1/2 3/4 1/2 , 3/4 1 3/4 , 1 1 , 1 1 , 2 80 8B 350 80 305 312 339 80

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Profi-E

Ref er t o set t i ng procedure bel ow w hen hardw are m ode i s sel ect ed ( condi t i on at t he t i m e of shi pm ent : The sw i t ch i s i nst al l ed on t he l ef t H W ) AD D RESS set sw i t ch 1 9 0 9 0 1 H ardw are m ode can set node address by t he 2 2 8 8 sw i t ch on t he ri ght . 7 7 3 3 Address set t i ng range i s 01 t o 99.

Low Maintenance Filter Series FN1

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

ARX Series

1 ARX20 mm Nil F ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

Nozzle Type Ionizer IZN10E Series ®

0.05 to 0.1 MPa Fitting (Applicable tubing O.D. 8 mm) + Tube (O.D. 8 mm, I.D. 5 mm)*1 0.05 to 0.3 MPa *1 When connecting the tubing, use a length of tubing 500 mm or less for the connection, regardless of the inside diameter size.

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Indicator Direction: 1 (180°), Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 1 (180°), Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9mm, Tubing: 01 (ø1/8"), Seal: S (w/Sealant)