VVXA21/22

Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

76

(For air ow capacity, refer to the Data E below.) 5 Options Refer to page 9. 6 Finalize the model number. Refer to page 2. 7 Select the optional accessories. Refer to page 10.

EXxx-OMN0029CN

EX600-ZMB2 (3)DIN DIN (4)DIN (5)(M4X20)(EX600-ZMA2) 0.70.8 Nm DIN DIN EX600-ZMA2 -16No.EX-OMN0029CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) A B C (EX600-ZT1) -17No.EX-OMN0029CN-D SI EX600-S A SI 1 PNP() 2 NPN() TM DN DeviceNet No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 () 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -18No.EX-OMN0029CN-D

With Factory Installed

and 4001) N NPT 40 1/2 B Bracket AW2001 AW4001 F G (PF) C Bowl guard (Only AW2001) Float type auto drain(N.C.)

PA3000/5000/PAX1000

(A) 2 N.O. N.C. N.O.

VK300

(R A) 2 1 (A P) Flow characteristics Weight (g) Operating pressure range (MPa) 1 2 (P A) 2 3 (A R) Port size Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Modular Type Regulator Series AR

4) Square embedded type Note 2) GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G27-10-R1 Note 3) Round 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

6 Component Parts Material Description Material Magnet Round head no. 0 Philips screw Hexagon socket head set screw Stopper Holder Stopper retainer Hexagon socket head set screw Hexagon nut Hexagon socket head cap screw Description No. !0 !1 !2 !3 !4 !5 !6 !7 !

CEP1

1 1 2 5 2-1. 5 2-2. 5 2-2-1. 5 2-2-2. 5 2-2-3. 6 2-3. 6 3 3-1. 7 3-2. 7 4 4-1. 8 4-2. 8 4-3. 8 5 5-1. 9 5-2. 10 5-3. 10 6 6-1. 11 6-2. 12 CEP1B12 13 CEP1B20 14 , 1 ,, , ,ISO4412 *1)JIS B8370 *2) ,, , ,, *1) ISO 4414 Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. *2) JIS B8370

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

PSxx-OMF0005CN

DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (