Compact Guide Cylinder End Lock Type SeriesMGP

25st or less Over 175st 25st or less Over 175st 42 4 4.5 3 6 M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

PC Wiring System Series PCW

Input PCW-EC16XBR00 PCW-EC16XBR01 PCW-EC16ZBM00 PCW-EC16ZBM01 Output Note PCW-EC16YBR00 PCW-EC16YBR01 Circuit board type With cover (DIN rail mount compatible) Circuit board type With cover (DIN rail mount compatible) 2 Series PCW-EC Circuit Diagram PCW-EC16XBR00 PCW-EC16XBR01 [Applicable PLC example: OMRON Corporation C200H-ID218] 115 114 113 112 111 110 109 108 107 106 105 104 103 102

3 Position Cylinder Series RZQ

21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5 19 63 9 3 Position Cylinder Series RZQ Foot type/RZQL Foot type (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 30 18 6.6 4 107.7 82.5 66.5 32 Special cap bolt 33 18 6.6 4 92 76 117.2 40 39 22 9 5 96.5 73.5 126.7 50 LY 46 102 28 11 5 76 138.2 63 LH Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4

Water-cooledThermo-chiller

3.4 gal (13 L) Approx. 3.7 gal (14 L) Circulating fluid recovery tank volume Note 7) 3.2 gal (12 L) Port size Rc3/4 Wetted parts material Copper brazing (Heat exchanger), Stainless steel, EPDM, Silicone, PPS, Fluororesin Temperature range 50 to 95F (10 to 35C) Required flow rate Note 8) 2.6 gpm (10 L/min) 5.3 gpm (20 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min) Inlet pressure range 44 to 102

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Input: CLR, TL Output: TLOUT Reconnect Reconnection of axis Reconnect Dimensions 34.5 w 102 4 No. Description Function 1 LCD A screen of liquid crystal display (with backlight) q r 2 Ring A ring for hanging the teaching box 3 Stop switch When switch is pushed in, the switch locks and stops.

ZP

Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101 p. 111 With buffer ZPR p. 46 p. 59 p. 82 p. 93 p. 102

RZQ

39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD LG 32 30 107.7 82.5 18 6.6 4 66.5 Special cap bolt 40 33 92 76 117.2 18 6.6 4 50 39 96.5 73.5 126.7 22 9 5 LY RE A B 63 46 102 76 138.2 28 11 5 LH REC Bore size (mm)

NVZseies

NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold. Abnk pbr .8dy DXT201-15-1A Side ported NW325.41-O-O Applicau Yelv .

3 Way,3 Port Solenoid Valve NVZ Series

NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold. Abnk pbr .8dy DXT201-15-1A Side ported NW325.41-O-O Applicau Yelv .

Base mounted VFS3000/5000/6000 series: ③ Base mounted VFS3000 to 6000 series
Manifold/01 type (with attachment plug lead wire): ④ Type 01 with attachment plug lead wire
Manifold/01T

Single/Base mounted VFR2000 to 6000 series: ① VFR series
Manifold/01T type (with terminal block): ② Type 01T with terminal block
Manifold/01C type (with multi-connector

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

Digital Flow Switch (Integrated display type) ( compatible)

Maximum Maximum 6 106 Maximum Maximum Maximum : Unit setting: G Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 Minimum -1 10-1 Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 Maximum 5 105 Maximum Maximum 6 106 Maximum Maximum -36No.PF-OMV0006-B [F 1] Setting of OUT1 The output mode of OUT1 can be selected.

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

LEC-T1_C

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

JXCx-OMT0005CN

2 12-13 2byte *1 *2 1 100 Get/Set 32 No.0 14-15 2byte *1 *2 16-17 2byte *1 *2 18-19 2byte *1 *2 20-23 14byte *1 *2 24-27 24byte *1 *2 28-31 4byte *1 *2 64 100 Get/Set 32 No.63 0-1 2byte *1 *2 28-31 4byte *1 *2 *1 *2 21(P.85 19 - 2IO Class 68h /IO IO IO DeviceNet 0Eh Get_Attribute_Single 10h Set_Attribute_Single Attribute Access Size Name Semantics of Value 100 Get 2 101 Get 2 102

XLG Series

(Take care not to damage the mounting surface of the body.) 3 Tightening torque Nm Valve size 2 1 -25 XLG-16 0.7 1.5 4 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 Wipe any dust off the O-ring surface and O-ring seat with a clean cloth (Bemcot TM) dipped into ethanol. Tighten the socket head cap screws in numerical order.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

RA 5 VA depth VB YC RB RB NA B XA depth XB NB Q 4 x M6 x 1 thread depth 12 (Mounting thread) O 20 20 FX FY FZ (Open DO) CB CA (Closed DC) WA depth WB 4 x M5 x 0.8 thread depth 10 Thread for mounting attachment M5 x 0.8 (Finger opening port) Closed EC Open EO K L J MHZ M5 x 0.8 (Finger closing port) MHF G MHL M (mm) MHR G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102