Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on U Side, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Plug-in w/D-Sub Connector on U Side, Stations: 8 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 8 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 8 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Compact Manometer Series PPA 1

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

Compact Manometer Series PPA 1

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

Pressure Sensor

PSE540(A) PSE541(A) PSE543(A) Rated pressure range 0 to 1 MPa 0 to -101 kPa -100 to 100 kPa Extension analog output range -0.1 to 0 MPa 10.1 to 0 kPa Withstand pressure 1.5 MPa 500 kPa Applicable Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 15 mA or less Analog output: 1 to

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

collector 2 outputs, with suction filter Fixed SI unit Note 7) 0 to 101 kPa/NPN open collector 1 output + analog voltage, with suction filter With unit switching function Note 6) (Initial value psi) 0 to 101 kPa/PNP open collector 1 output + analog voltage, with suction filter P 100 to 100 kPa/NPN open collector 2 outputs, with suction filter Note 6) Under the New Measurement Law, sales

Series PPA PPA100/101/102 Compact Manometer 4

4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell for the domestic

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

ZP

10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Page 603-10 JXC-CD-T JXC-CD-S Straight type JXC-CL-S Straight type T-branch type (Accessory) To SI To ENC To SI To MOT Provided by customer (3 m) Communication cable To PWR Page 603-10 Power supply for controller 24 VDC Power supply plug (Accessory) Page 603-10 Options Teaching box Controller setting kit Conversion cable Note) Page 603-10 P5062-5 (0.3 m) Page 603-10 (With 3 m cable) LEC-T1

Electric Actuators

to 150 10 to 150 10 5 5.5 to 11.2 5.4 to 9.0 4.4 4.4 3.3 3.3 10 to 200 10 to 200 10 to 150 10 to 150 10 10 2.8 to 5.6 2.7 to 4.5 3.3 3.3 2.2 2.2 20 to 350 Note 4) Basic Compact Basic Compact Basic Compact Basic Compact Basic Compact Horizontal Max. work load [lb] Note 2) Note 3) Vertical Actuator specifications Electric specifications 20 to 300 Note 4) Horizontal 20 to 350 Note 4) Speed

Electric Actuator

50 60 70 80 10 20 Work load [kg] Work load [kg] LEJS63/Ball Screw Drive: Vertical LEJS63;A LEJS63;B 20 Duty ratio: 50% 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 15000 15000 10 10 Duty ratio: 75% Duty ratio: 75% 5000 5000 0 0 0 10 2.5 5 7.5 0 20 15 5 10 Work load [kg] Work load [kg] LEJB40/Belt Drive: Horizontal LEJB63/Belt Drive: Horizontal 20

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Step Motor Driver （ Pulse input type ）

10 10 10 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 101 - Appendix 1.5 LER series setting value LER Step data default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 No. 0 0 0 0 0 0 Movement MOD ABS ABS ABS ABS ABS ABS Speed 280 420 280 420 280 420 Position 0.00 0.00 0.00 0.00