Passage: Top Ported Common EXH-Integrated, Stations: 4 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH-Integrated, Stations: 6 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH-Integrated, Stations: 5 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH-Integrated, Stations: 8 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 4 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH-Integrated, Stations: 10 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH-Integrated, Stations: 9 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 3 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 2 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 14 Stations Top Ported/Valve, Port Size: -, Thread: -

Digital Pressure Switch

1, After the Key lock setting has been completed, perform the first three steps in the unlocking procedure (page 40). 2, After the security code has been entered and the display changes to UnL, press the and buttons simultaneously for 5 seconds or longer. 000 is displayed and a new security code can now be entered.

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

VQ4000

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

VR4151/4152

VR1210-01 Model VR1220-02 1.0 MPa 0.05 MPa Max. operating pressure Min. operating pressure Min. pressure differential 0.05 MPa 5 to 60C (No freezing) SA Ambient and fluid temperature Effective area Port size Weight 7 mm2 15 mm2 VA 1 8 1 4 24 g 45 g SA How to Order VA 01 0 VR12 1 VM 01 Port size VR 1 8 1 4 02 JIS Symbol VH Nil Thread type VHS Rc NPT N G F standard 1 Body size 1 8 Construction

ALF400 to 900, ALT-5/-9

ALF400 to 900, ALT-5/-9 Series Operating Pressure Range Tank and line pressure How to Order ALF 40 02 0 (2) (1) Option Operating allowable range Operating allowable range Tank pressure (MPa) Nil R Auto Feed Lube Flow direction: Right to left Option Body size Port size Nil Description Applicable model Symbol 40 50 60 80 90 2 1 02 03 04 06 10 12 14 20 4 1 4 3 8 3 B With bracket

Heatless Air Dryer ID Series

0 Semi-standard (option) ID200 Basic size Description Bracket Symbol Nil B Z 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04 06 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

3 Port Solenoid Valve

Gray (40) (4.1) (10) (8) (6.9) Black Red With power saving circuit Electrical Circuit (with power saving circuit) Power consumption is reduced by approximately 75% compared with the standard product by eliminating the need for electrical current for holding.

CC-Link-E

Af t er set t i ng t he sw i t ch, t i ght en t he sw i t ch cover i n t he reverse order of t he above procedure. ( Ti ght eni ng t orque 0. 6 t o 0. 8N m ) Setting of node address and com m unication rate Pl ease execut e t he set t i ng of node address and t ransm i ssi on rat e w i t h t he di p sw i t ch. 1 2 3 4 5 6 7 8 9 10 SW 40 SW 20 SW 10 SW 08 SW 04 SW 02 SW 01 BS4 BS2 BS1 Tabl

PSxx-OMU0008CN

(L) N02(L) F02(L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D