SMC Corporation of America
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(with no condensation) Ambient humidity range Resistance 10 to 500Hz at whichever is smaller of 1.5mm amplitude or 98m/s acceleration, in X, Y, Z directions for 2 hrs. each (de-energized) Vibration resistance 980m/s in X, Y, Z directions, 3 times each (de-energized) Impact resistance 0.5% F.S. or less based on 25C Temperature characteristics Power supply/Output connection: 8P connector, Sensor

to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20

UP button ( button) t y u i Use to select the function. SET button ( button) y Use to change the mode or decrease the set value. DOWN button ( button) Use for changing the function.

Foot/(L) Cushion valve Port LY 4-LD LH LT X Y X Y LX LS + Stroke LZ ZZ + Stroke (mm) Foot Stroke range Bore size (mm) LX LT LS LH LD Y ZZ X LZ LY 32 40 50 63 80 100 53 59 72.5 82.5 32 38 46 56 72 89 3.2 3.2 3.2 3.6 4.5 4.5 128 132 148 148 174 178 30 33 40 45 55 65 7 9 9 12 12 14 9 11 11 14 14 16 162 170 190 193 230 234 22 24 27 27 30 32 50 55 70 80 100 120 up to 700 up to 800 up to 1000 up

Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

to 60C (with no freezing or condensation) Operating temperature range EnvironOperating humidity range mental Operating and stored: 35 to 85%RH (with no condensation) Withstand voltage resistance 1000 VAC for 1 min. between live parts and enclosure 50 M or more between live parts and enclosure (at 500 VDC Mega) Insulation resistance 10 to 500 Hz, 1.5 mm or 98 m/s2 amplitude in X, Y, Z directions

75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Figure 2-1 Y 'a\ ' ( )Y 'J *Tl /\S-l_l 1 Swttch 2 Switches San Slde 2 Switches Flgwa 2-2 Flgur 2-3 Flgurc 2-4 Series NCDQT 1-2). Boro 106 (1116") 400 (4") Auto switch installation.

$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates. Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

Figure 2-1 Y 'a\ ' ( )Y 'J *Tl /\S-l_l 1 Swttch 2 Switches San Slde 2 Switches Flgwa 2-2 Flgur 2-3 Flgurc 2-4 Series NCDQT 1-2). Boro 106 (1116") 400 (4") Auto switch installation.

) 10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

(mm) Operation direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGF OUT 62.8 94.2 126 157 188 220 251 283 314 314 20 8 IN 52.8 79.2 106 132 158 185 211 238 264 264 CY1 OUT 98.2 147 196 246 295 344 393 442 491 491 25 10 MY1 IN 82.4 124 165 206 247 288 330 371 412 412 OUT 161 241 322 402 482 563 643 724 804 804 32 12 IN 138 207 276 346 415 484 553 622 691 691 OUT 252 378 504

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates. Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !