Solenoid: No.1 Solenoid, Body Option: 5 (20A), Style: 0 (Energized Open/N.C.), Option: Q (Stainless Steel Body & Shading Coil, PTFE (FPM) Seal, Class H Coil), Port Size: 06 [3/4 (20A)], Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Solenoid: No.1 Solenoid, Body Option: 5 (20A), Style: 0 (Energized Open/N.C.), Option: Q (Stainless Steel Body & Shading Coil, PTFE (FPM) Seal, Class H Coil), Port Size: 06 [3/4 (20A)], Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: G (Grommet)

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

51

2 q y e !1 i u w Contents Replacement Parts/Seal Kit Note No. Component Parts Description Rod cover Tube cover Piston Piston rod Bushing Bumper A Bumper B Wear ring Rod end nut Rod seal Piston seal Tube gasket Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Bore size (mm) Kit no.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note Platinum silver Platinum silver Black Black q Description Sub-plate Body Aluminum die-casted Stainless steel w e Mounting bolt and gasket are not attached. : Thread type Spool/Sleeve Adapter plate Thread Type r Resin t Resin End plate Nil Standard Rc y Resin Piston NPT N Option T NPTF G F Replacement Parts Description Material Part no. No.

HAA

Symbol Description Port size Nil Symbol Size Applicable model D Auto drain F Dust-protecting filter S Mounting bench 3 4 06 Rp socket 10 1B union 14 1 union HAA7 HAA15 HAA22, 37 1 2B Source voltage Symbol Voltage Applicable model 1 2 3 Single phase 100 VAC Single phase 200 VAC Three phase 200 VAC HAA7, 15 HAA7 HAA15, 22, 37 How to Calculate Outlet Air Temperature Outlet air temperature can

Air Cooled Aftercooler Series HAA 1

-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HAA15/22 Air inlet Air outlet Port size Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q

Set Flow: 10 (1~10l/min), Thread: Rc(PT), Port Size: 06 (3/4), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 0 (w/o Neon Lamp), CE-compliant: Q (CE-compliant)

Set Flow: 20 (10~20l/min), Thread: Rc(PT), Port Size: 06 (3/4), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 0 (w/o Neon Lamp), CE-compliant: Q (CE-compliant)

Set Flow: 50 (20~50l/min), Thread: Rc(PT), Port Size: 06 (3/4), Terminal Box: 6 [Terminal Box (For 24VDC, +COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)], CE-compliant: Q (CE-compliant)

Classification of Waterproof: 1 (Drip Proof/Rain Proof), Set Flow: 0 (14 to 60 l/min), Thread: N (NPT), Port Size: 06 (3/4), Fluid Contact Area Material: 1 (SUS304), Seal Material: 1 (FPM), CE-compliant: Q (CE-compliant)

Classification of Waterproof: 2 (Jet Proof/Splash Proof), Set Flow: 0 (14 to 60 l/min), Thread: N (NPT), Port Size: 06 (3/4), Fluid Contact Area Material: 1 (SUS304), Seal Material: 1 (FPM), CE-compliant: Q (CE-compliant)

Classification of Waterproof: 0 [Standard (Non Water Proof)], Set Flow: 0 (14 to 60 l/min), Thread: N (NPT), Port Size: 06 (3/4), Fluid Contact Area Material: 0 (Copper Alloy), Seal Material: 0 (NBR), CE-compliant: Q (CE-compliant)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 1T (Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None; Temp.: Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.