Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: A (Brass Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: A (Brass Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

IDX-OM-U010

ABOUT REINSTALLATION . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1

IDX-OM-W093

(REFRIGERANT) IDF60-20) W R 0001 (2018 4 ) W R 0001 2018 2019 2020 2021 W X y Z 1 2 3 4 o P Q R o 1 Z 12 A Z IDF60/70/80/90 Series 1-5 IDX-OM-W093 1.3 HFC 1-5 IDF60/70/80/90 Series 1-6 IDX-OM-W093 1.4 / 1 1.5 () IDF60/70/80/90 Series 1-7 IDX-OM-W093 IDF60/70/80/90 Series 1-8 IDX-OM-W093 2 2.1 IN OUT (ONOFF ) 6-4 6-4 IDF60,70,80,90-20 IDF60,70,80,90-30 AC200V AC200V L1 L2

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

ZMA

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

Air Catch Sensor

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 A1 A2 A3 LW06 LW2 LD4 LD8 100 VAC 200 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC 4-13-3 4 For details about the applicable products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) q Energy saving static neutralization nozzle with right angles: IZN10-01-X367 wHigh flow rate nozzle with right angles: IZN10-02-X367 5 5 0.1 MPa 0.05 MPa 0.3 MPa 0.1 MPa 0.05 MPa Discharge time (Static neutralization time) [s] Discharge time (Static neutralization time) [s] 4 4 3 3 0.3 MPa 0.7 MPa 2 2 0.5 MPa 0.5

VXA21/22

Series VXA21/22 Dimensions (Orifice Size: 3 mm, 4.5 mm, 6 mm) VXA212/VXA213/VXA223/VXA224 Bracket Pilot port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Spanner spout, hexagon Model Port size P Rc A B C D E F With bracket Port size G H I J 1 8 1 4 1 4 3 8 10 VXA21

VNH

Bracket U: Long hole for mounting 4 positions Flow indicator for 2 port valve Dimensions (mm) Model Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1

ZQ-OM01401

Q1 1)2) () Q2 G (2m) 1) 2)+COM (8) (V ) 0 (M5x0.8) (3) 1 3.2 () L L 0.3m 2 4 () 3 6 () 4 3.2 () LO L 5 4 () (9) (PSPV ) (4) 0 (M5x0.8) 3) B 2 4 () 3) (2)Q1 3 6 () (3)Q2 5 4 () (10) (1):U 4) ) (5) ( [kPa] 7) Assy EA NPN2 EB PNP2 0 to -100 N EC NPN1 + C EE PNP1 + D FA NPN2 (1):M FB PNP2 9) 7) (PD) -100 to 100 FC NPN1 + FE PNP1 + S 5) F C 4) ZFC 5

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

30

u r t y e i w Note Manganese phosphate Chromated Description Material Steel Aluminum Steel Steel Synthetic rubber Steel Steel Steel No. 1 2 3 4 5 6 7 8 Stud Case Ring Cap Dust cover Set screw Rod end nut Washer Black zinc chromated Zinc chromated Zinc chromated J J Dimensions JC20 to 63 M Center of sphere M U U D F G P H A R E B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

2 M4f.7 optr-8 1.57 (40) 276 o0) 0.13 (x2l 0.79 (m) 0.79 \20) 6.95 076.5) 'Remove drain cock to obtain 1/4 pipe lhread (220 only) Typical Applications r t l -i-E-:I I I ; | | | ' \t/ H

IDX-OM-W095

(REFRIGERANT) IDFC60-23 W R 0001 (2018 4 ) W R 0001 2017 2018 2019 2020 V W X Y A Z 1 2 3 4 o P Q R o 1 Z 12 IDFC60/70/80/90 Series 1-4 IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3

Air Cylinder NCJP Series Pin Cylinder

Part No. cD-P11 cD,p12 Load voltage 100 vAC ziovac 24VDC 2smA 12.5mA 5omA Inch Contacl Proleqtion gox/Dimensions 0.80 1_20 1.40 ot7,.., 15 iffiqffi Hou To MountThe Auto Stoitch fllL_ #F*t-q -s-ffi*""*"-'" *-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP