RHC

10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500 24.5 = 0.7 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 1000 1500 2000 2500 3000 500 1000 1500 2000 2500 3000 48.5 150 CEP1 80 72.5 96.5 0.5 120.5 100 0.1 0.3 CE1 106 38 50

Soft Start-up Valve

N M P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D 2 x W 4 x W Y V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats

q"s

, Connection thread f--Tpr -l rype T N--fNPr _-.l LT.l "-_l llTV20-02-3 . . . . . . . . . . . . . . . . . . . . . . . . 1 set (3 station manilold base parl no.) + tIV203o-31 1S-X26 .1 set (Elsctro-pneumalic regulator pad no-)Nole2) +P398020-13 . . . . . . . . . . . . . . . . . . . . 1 set (Blanking plate assembly parl no.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

[Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

High Power Cylinder:

12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12 3/8 12 0.1 0.3 20 10 Note) Refer to p.4.10-5 for max. absorbed energy

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

VHS

pressure relief 3 port valve Port size 02 1 4 Body size Piping 03 VSH40l 3 8 0 1 Left(P) Right(P) Rc(PT) 4 5 3 4 1 2 Port thread 04 1 2 06 VSH50l 3 4 N NPT 1 4 3 8 Applicable port size: , F G(PF) JIS Symbol Circuit Example 3.6-15 Hand Valve Series VH Construction Precautions Be sure to read before handling.

AMR3000 to 6000

AC 8 3 standard standard standard Pressure switch 1 2 None E2 E3 E4 E6 E10 S None With pressure switch AV Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR3000/4000 AMR3000/4000 AMR4000/5000 AMR5000/6000 AMR6000 1 standard Port size AU Thread Thread Symbol Port size Applicable model N F Rc (PT) NPT G (PF) Rc(PT) NPT G(PF) N F 02 03 04 06 10 1/4 3/8 1/2 3/4 1 AF The port size of adapter ass'y

NAMUR

Note) For other voltages, please contact SMC. 3-12-1 A Series VFN2000N Dimensions (mm) VFN2120N--02 148 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 37 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1

VFS4000-OMY0001

20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc

Digital Flow Switches

times each Impact resistance Noise resistance 1000Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 410g 470g 650g 1,100g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3.

HRX-OM-W038

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-O021

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRL

HRL A 40 100 Cooling capacity DI option Cooling method CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW Nil CH2 With electric conductivity control D1 CH1, CH2 With electric conductivity control A Air-cooled refrigeration Pipe thread type Power supply Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) 40 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480

CJ2X/CUX/CQSX/CQ2X/CM2X

: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 6, 8 8, 10 6 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min (ANR)) 7 12 38 Controlled flow -X Effective area (mm2) 0.1 0.6 0.2 Air flow (l/min (ANR)) 175 350 75 295 Free flow 20Effective area (mm2) 1.1 5.3 2.7 4.5 Note) Supply pressure

CJ2X/CUX/CQSX/CQ2X/CM2X

Data Low speed cylinder Conventional cylinder Low speed cylinder Time 10-3-2 10-3-3 3 Low Speed Cylinder Specific Product Precautions Be sure to read before handling.

CEx-OMQ0013

CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power

VXD21/22/23

LVA LVH Connection 1 4 3 8 1 2 3 4 02 03 04 06 10 LVD Thread type Nil T F N Refer to the table (2) given below for availability. Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 LQ 32 40 50 For 32A For 40A For 50A Flange LVN Refer to the table (1) given below for availability.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Brake mechanism added

Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699