Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 27 Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + 19.7 11 B A 5 35.1 [42.1] M5 x 0.8 (A, B port) 2-2.6

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

Speed Controller with Indicator

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

3 Port Solenoid Valve Series SYJ300/500/700

size M3 x 0.5 A port M3 x 0.5 M5 x 0.8 X port Note) M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3 x 0.5 0.9 Type SS3YJ3-20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M5 x 0.8 M3 x 0.5 1.5 0.17 0.36

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 2 (2) AS121F-M3 AS131F-M3 M3 x 0.5 (2) AS121F-M5 AS131F-M5 M5 x 0.8 AS121F-U10/32 AS131F-U10/32 10-32UNF Tube swivels 360 Universal type permits 360 piping swivel. (2) AS221F-01 AS231F-01 R1/8 AS221F-02 AS231F-02 R1/4 2 size added to applicable tubing sizes Metric size (Release

CV/MVGQ

) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8

CV/MVGQ

2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (

Series VQ Metal Seal/Rubber Seal Body Ported

(1.5W) (0.5W) Seal M5 thread Low wattage Y (2) H (2) High pressure 0 1 Metal Rubber Note) See Options on p.1.10-67 for inch-size One-touch fittings.

CQS

Basic style (Through-hole/Both ends tapped common): CQSK/CDQSK 12 16 Auto switch Minimum lead wire bending radius 10 2 x 2-OB counterbore H thread effective depth C 2-M5 x 0.8 2 x 2-OA effective depth RA Note) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-N through

Possible to transfer a workpiece at low-speed.

5 y q r 312 CRQ2X Series Low-Speed Compact Rotary Actuator Rack & Pinion Type Dimensions Size 10/15 3H9 effective depth 2 CRB2 TA 0.6 CRB1 30 MSU BU CRJ CRA1 2 x M5 x 0.8 through (Opposite side 7.6 counterbore depth 4.2) B CRQ2 MSQ With double shaft DD W D MSZ CRQ2X MSQX CRQ2X MSQX H 2 10 2 x M5 x 0.8 (Port) MRQ (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

MXS

CXT With end lock(12) MXS12-llR With buffer(12) MXS12-llF MX 2-M5 X 0.8 thread 8 deep MXU Operating port 2-M5 X 0.8 J 10.5 MXS 38 MXQ 9.5 14.5 MXF 16 37 3 29 MXW 30 0.5 * Other dimensions not indicated are same as the basic style.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

ASP ASN How to Order AQ 2 2 0 0 01 M AS ASV Body size M5 standard 1/8, 1/4 standard Type AK Made to Order Refer to the below for details. 1 2 2 Direct cylinder elbow type VCHC Lock nut option Option None With seal Nil S Nil J Hexagon lock nut Round lock nut Control type 0 1 ASR ASQ Meter-out Meter-in M5 and U10/32 are not available with seal.

CXS

5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0 x 18.5 53 CXS20 2-M5 x 0.8 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 7.5 80 30 78 28 14 60 35 6 12 12 30 12 M6 x 1.0 x 18.5 64 CXS25 2-M6 x 1.0 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 8 98 38 96 36 18 75 44 8 16 14 30 16 M8

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Bottom Mounting: CJ2RA, CJ2RA 10112122X GC Y Relief port M5 x 0.8 GA GB Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 MM C D B 0 0.3 L LX B 0 0.3 LB LH Head cover port location Axial (R) NA H A Z + Stroke S + Stroke NB 2 x LD The overall cylinder length does not change.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(g) Applicable valve model Applicable stations Series Base model Port size Port location 1(P), 3(R) 2(A) C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 2 stations: 83 Addition per/station: 19 2 to 20 stations VV3QZ12VQZ115 Rc 1/8 VQZ100 Top V100 2 stations: 68 Addition per/station: 20 C4 (For 4) C6 (For 6) M5 (M5 thread) 2 to 20 stations VV3QZ22VQZ200 Rc 1/8 Top VQZ22 SY SYJ C6 (For 6

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc