5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(

80

Flow rate characteristics show those when the port size is M5 (size 1) or 1/8 (size 2).

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Seal retainer Port spacer Steel ball Snap ring B Housing Piston rod A Piston rod B Rod cover Head cover Plate Piston A Piston B Bumper A Magnet Bumper bolt Hexagon nut Bumper B (1) (1) Nickel plated (2) Hard anodized Chromated Chromated Nickel plated Hard chrome plated Nickel plated Nickel plated Nickel plated Replacement Parts: Seal Kit Nickel plated Nickel plated Nickel plated Hexagon socket

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 38 4 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 52 8 41 4 54 90.5 21 80 14 24 22 100.5 16 40

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

36 ZPT16F-B5 ZPT20F-B01 2 16 18 Rc 1/8 6.2 14 ZF 15.5 12.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT25F-B8 25 28 M8 x 1.25 8 12 ZP 36 ZPT25F-B01 40 50 8 01 Rc 1/8 6.2 14 ZPT F-B (Without buffer/Female thread) ZPT32F-B5 32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

VFS

Port Port size BP01 BP02 P, A, B Rc Rc , EA, EB M5 Rc 1 8 1 8 ( ): Port size P02 1 4 1 8 Sub-plate Compact: Non plug-in VFS210--(B) Sub-plate assembly part no.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom

CRQ2

Thread type Port type Port type Nil Nil TF TN TT Size 10, 15 Number of auto switches Port type Nil Nil TF TN TT Size 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil S 2 pcs. 1 pc. 20, 30, 40 20, 30, 40 Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.

SZ3000

3-22 23 Cassette Type Manifold Plug-in Type Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60PD Stations B(26 pins) 2n1-M5 x 0.8 [4(A), 2(B) port] With external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 36.7 SV 34 34 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 SZ P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A

Vacuum Pad: Ball Joint Type

thread) M10 x 1 M5 x 0.8 Hexagon width across flats 14 M5 x 0.8 M8 x 1 5 Hexagon width across flats 12 3 20 D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

CL

CNA 125 to 160 CNS CLS B Rc BP lock-up port A Rc BP lock-up port Unlocked when pressurized CLQ 4-FD 2-Rc P With rod boot MLGP RLQ EB EA D MLU Plug cap 2 positions Width across flats KA ML1C S + Stroke ZZ + Stroke h + l DZZ + l + Stroke -X 20Data Bore size (mm) Stroke range A AL B B1 BF BX BY C D EA EB F FD FT FX FY FZ GA GB BP GC H1 J K KA 1/4 1/4 1/4 1/4 1/2 1/2 3/4 50 63 80 100 125 140

MGP

*Seal kit includes piston seal @1, rod seal @2, gasket A @3 and gasket B @4.

MXW

MXW20 M5 x 0.8 M4 x 0.7 MXW8 2.1 8 0 0 8H9 + 0.036 depth 9 5H9 + 0.030 depth 4.5 18.5 7.4 MXW25 M6 x 1 M5 x 0.8 MXW12 4.4 10 0 0 6H9 + 0.030 depth 5.5 M6 x 1 6.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

15.5 45 29 MSQ MRQ D20Angle adjustment bolt 2-M5 x 0.8 (Port location: Side ported type only) A port B port 1 24 2 60 (69) 18.5 34 D-97/93A 15 30 11-5-11 11 Series MSUA These drawings indicate the condition when the B port is pressurized.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

28 7 5.5 5.5 5 21.5 15 15 15 42.5 34.5 30 24 88 64 62 62 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M14 x 1.5 M32 x 2 Axial Foot (L): CBM2L, CBM2L 10112122H A K F AL H2 Relief port M5 x 0.8 24 2 x P (Rc, NPT, G) F DL 2 x NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4 x LD 2 x LC MM Width across flats B2 G Relief port G Relief port

Battery-less

1 !4 !5 !3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

SMC

end) 20 47 50 28 38 16 F 4H9 depth 3.5 +0.030 0 2-M5 x 0.8 thread depth 8 N 4-M4 x 0.7 thread depth 6 35 1 x F 2 4H9 depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71