Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread Female thread 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Rod end thread tolerance JIS class 2 50 to 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 +1.0 0 Stroke length tolerance When stroke exceeds the standard range, refer to page 7-6-121.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

5 Port Air Operated Valve SYA3000/5000/7000 Series

) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1470 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position double SYA7220-(F2) C8, N9 C10, N11 96.2 2 x M5 x 0.8 (Pilot port) 76.2 SYA SYA 13.6 B SYJA A VZA 2 x 4.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 42 VFA (66) VFRA 2 x

CY1F

90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 105 RB0805X552

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Low Profile Guide Type

18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Applicable bore size (mm) + 0.048 0 + 0.048 0 10 CJ-T010SUS 3.3 4.5 29 18 3.1 2 9 40 22 32 12 A D L MM N R W Flat type Round type 16 CJ-T016SUS 5 5.5 35 20 6.4 2.5 14 48 28 38 16 Individual -X 10 8 6 8 10 CJ-CF010 13 M4 x 0.7 10 CJ-CR010 16 7 10 12 CJ-CF016 15 M5 x 0.8 12 10 CJ-CR016 Technical data 839 Stainless Steel Cylinder Series CJ5-S/CG5-S Proper Auto Switch Mounting Position (Detection

Dual Speed Controller with One-touch Fitting Series ASD

port is either M5 or 10-32UNF thread, it is not available with seal.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

holes SY 0.8 4 8.6 SYJ 17 10 24 SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34mm2 SX 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 VK Manual override C6: One-touch fittings for 6 M5: M5 thread VZ VF 25.5 (M5) 9.5 (C3, C4, C6) VFR (47.5) VP7 VP4 26.5 5.4 18.5 VQ 23.2 Mounting holes 5 2 VQ4 10 25.5 9.5 VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

0.

, 1/8" 4, 5/32" 6, 1/4" 38.4 13.8 6 10 2 A 16 4.3 2 x 3.2 (For mounting) + 24.3 Manual override (Lead wire length) 29.9 Approx. 300 53.8 1.2 C6: 29.1 N7: 32.9 (3.2) With bracket Note) For bracket assembly part no., refer to page 16. 19.5 16.3 13.6 7 2 x 3.4 (For mounting) 41 VQZ115l-lGl1-M5-PR M5 x 0.8 (X: External pilot port) M5 x 0.8 [1(P), 3(R) port] M5 x 0.8 [2(A)

15

30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46 10 CY1S25-Z M6 x 1 M6 x 1 10 26.4 52 8.5 40.5 40.5

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

VKF300

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 11 Series VKF300 Specific Product Precautions Be sure to read before handling. Refer to pages 8 through 11 for safety instructions and precautions. Light/Surge Voltage Suppressor Use of the DIN Connector Manual Override Operation Warning Caution Caution Connection procedure 1.

Electric Rotary Table

sides (mm) Max. gripping force (N) Stroke/both sides (mm) Size Stroke/both sides (mm) Size Size Size Basic Compact 4 6 10 14 22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller

/

20 44.5 84 36 25 163 50 100 70 9 37 3 x 3/4 1/4 96 43 60 163 24 60.5 100 49 34 175 63 126 92 0.5 40 3 x 1 1/4 96 43 64.5 167.5 24 60.5 104 49 34 179.5 63 126 92 5 44.5 3 x 1 1/4 113 48 65.5 171.5 24 66.5 115 56 38 183.5 70.5 141 109 41.5 P Q R S T U Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 For M5 M5 186.5 20.8 145.7 81.1 For M5 M5 188.5 20.8

E-P HYREG ® Series VY1

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 3 1 4 6.5 depth 3.4 4 3.4 105 RB0805X552

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 3 1 4 6.5 depth 3.4 4 3.4 105 RB0805X552

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Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71