Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 3 Stations

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 4 Stations

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 5 Stations

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 6 Stations

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 10 Stations

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 12 Stations

Piping: Body Ported/Common SUP Common EXH, Stations: 2 Stations, A B Port Size: -

Piping: Body Ported/Common SUP Common EXH, Stations: 3 Stations, A B Port Size: -

Piping: Body Ported/Common SUP Common EXH, Stations: 4 Stations, A B Port Size: -

Piping: Body Ported/Common SUP Common EXH, Stations: 5 Stations, A B Port Size: -

Piping: Body Ported/Common SUP Common EXH, Stations: 6 Stations, A B Port Size: -

Piping: Body Ported/Common SUP Common EXH, Stations: 10 Stations, A B Port Size: -

Piping: Body Ported/Common SUP Common EXH, Stations: 12 Stations, A B Port Size: -

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

ZR IN side, OUT side (/min (ANR)) Weight (g) Model ZM ZFC100-04 4 10 11.5 ZFC100-06 6 20 ZH Metric size ZFC200-06 6 30 21.5 ZU ZFC200-08 8 50 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZFC101-03 5/32" 10 11.5 ZL ZFC101-07 1/4" 20 Inch size ZFC201-07 1/4" 30 ZY

AS

ASD Model Meter-out type Rod and applicable tubing O.D. 4 10 8 6 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE The lock nut provides identification.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 112.5 121 133 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21

CL

8.5 10.5 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40 10.5 M10 x 1.25 25.6 10 10 M14 x 1.5 18 10 Y-G04 16 22 M14 x 1.5 41.6 Rod Side Pivot Bracket Head Side Pivot Bracket 20 to 40 Material: Rolled steel 20 to 40 Material: Rolled steel TU TN TU TdH9 TdH9 TN TR TR TH 0.1 TH

LEC-OM069xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time Constant