Series: 2 (VQ20), Stations: 6 Stations, Option: DO (DIN Rail Mount w/o DIN Rail), Thread: 00N (NPT3/8)

Piping: Common SUP/Individual EXH, Stations: 6 Stations, Bracket: None, Thread: NPT, CE Approval: -

Series: VQ20, Stations: 6 Stations, Option: DIN Rail Mounting, Thread: NPT3/8

Series: VQ20, Stations: 6 Stations, Option: DIN Rail Mount w/o DIN Rail, Thread: NPT3/8

Series: VQ30, Stations: 6 Stations, Option: DIN Rail Mounting, Thread: NPT3/8

Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: NPT

Manifold Type: Body Ported, Bar Manifold, Flat Cable, Valve Stations: 6 Stations, A, B Port: NPT

Manifold Type: Body Ported, Flat Cable, Valve Stations: 6 Stations, A, B Port: NPT

Type: Common SUP/Individual EXH, Stations: 06, Bracket: None, Thread: NPT

Piping: Body Ported, Stations: 6 Stations, A, B Port: NPT

Manifold Type: Body Ported, Valve Stations: 6 Stations, A, B Port: NPT

Series: 3 (VQ30), Stations: 6 Stations, Option: D (DIN Rail Mounting), Thread: 00N (NPT3/8)

Piping: 21 (Body Ported), Stations: 6 Stations, A, B Port: 00N (NPT)

AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

ALF400 to 900, ALT-5/-9

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio.

Soft Start-up Valve AV2000/3000/4000/5000 1

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

212

] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60] 6.6 [25] 0.00 0 0.1 [0.5] 0.3 [1] 0.4 [1.5] 0.5 [2] 0.8 [3] 0.9 [3.5] 1.1 [4] 1.2 [4.5] 1.3 [5] 0.7 [2.5] Flow rate gal/min [L/min] Flow rate gal/min [

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

T0604 How to Order T 0604 B 20 Max. operating pressure Max. operating pressure Color Length per roll Nylon tubing 20 20 m 100 m roll (Black, white only) Symbol Color B W R BU Y G Operating temperature (C) Black White Red Blue Yellow Green 100 Tube size Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio.

Clean Regulator

Flow Rate Characteristics Construction XT13-394-06, 10 Max. operating flow rate It is recommended to be used within the max. operating flow rate (negative) range. ( ) Conditions/ Inlet pressure: 0.5 MPa, Fluid: Water 0.5 82 SMC Outlet pressure MPa 0.4 K P C U O S H L 0.3 0.2 82 0.1 0.0 10 20 30 40 50 60 70 0 Flow rate L/min (ANR) w INA-48-1-06, 10 142 (Max. 146) Conditions/ Inlet pressure

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.