REA/REB

0.02 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 0.5 1.5 2.5 0 0.5 1.5 0 1.0 Moment (Nm) Moment (Nm) REAH15/20/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25

KJ

(mm) <M3, M5> <M3, M5> Weight (g) Note) Model M L A D KJS23-M3 KJS23-M5 KJS04-M3 KJS04-M5 KJS04-01S KJS06-M5 KJS06-01S M3 x 0.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 16.3 19.7 16.3 18.7 19.7 19.5 20 1.4 1.3 2.8 1.6 2.7 5.4 3.3 5.2 13.7 16.6 13.7 15.6 15.7 1.5 2 1.5 2.5 3 2.5 4 12.7 3.2 7 2.5 1.4 8 Applicable tubing Applicable tubing 4 12.7 4 4 M5 x 0.8 R 1 8 9.8 16.4 16 4 10 4 10 13.5

Manifold Specifications

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

Body through-hole Applicable bolts Model MHK2 -12 MHKL2-12 MHK2L-16 MHKL2-16 MHK2L-20 MHKL2-20 MHK2L-25 MHKL2-25 0.59 M3 x 0.5 Max. screw-in depth l mm Applicable bolts Applicable bolts Model Model M4 x 0.7 1.4 MHK2 -12 MHK2 -12 MHKL2-12 MHK2L-16 MHKL2-16 MHK2L-20 MHKL2-20 MHK2L-25 MHKL2-25 M3 x 0.5 M3 x 0.5 4 0.59 MHK2L-16 MHKL2-12 4 5 0.88 0.74 M5 x 0.8 2.8 M3 x 0.5 0.88 M4 x 0.7 M4 x 0.7

Series SY100 3 Port Solenoid Valve Rubber Seal

VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ... Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold.

Escapements Series MIW/MIS

6 18 15 17.5 26 5 5 M6 x 1 M5 x 0.8 M3 x 0.5 14 26 6 2.8 25 10 7 15 12 8 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 28 14 10 20 14 12 25 25 8 40 6 14.5 2.5 M10 x 1.5 M4 x 0.7 20.4 39 Rc1/8 34 12 12 15 25 11 RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD Model 2 5.7 7 6 12.5 4 8.5 18.6

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Silencer Series AN

(1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (M3) AN120-M5 (

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

60 9.5 11-/22-MXP6-10 834 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP10 11222 x M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2 x M3 x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port Width across flats 5.5 4 x M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

30 1003 5 10 20 30 50 100 200 50 100 200 Horizontal Vertical (downward) Vertical (upward) m1, m2, m3 max. m1, m2, m3 max.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators 33.4 32 36 120 120 A C 32 8.5 8.5 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 9.5 3 x M3 x 0.5 thread depth 6 25 25 M3 x 0.5 Finger closing port P.C.D.24 (Mounting thread) M3 x 0.5 Finger opening port 31 9h9-0.036 0 1 32 5 15 19 10 5 (35) 7 14.5 M3 x 0.5 thread depth 4 6 x M3 x 0.5 thread depth 6 (A, B, C common view) Vacuum suction

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Example 2) Obtain the saturated steam flow rate when P1 = 0.8 [MPa] and DP = 0.008 [MPa] with a solenoid valve with a Kv = 0.05 [m3/h]. Read off Q0 when P1 is 0.8 and DP is 0.008 in Graph (2), the reading is 20 [kg/h]. Therefore, the flow rate is calculated as the formula: Q = 0.05/1 x 20 = 1 [kg/h].

Compressed Air Preparation Filter

] [C] [g/m3] [mg/m3] 0 As specified by the equipment user or supplier and more stringent than class 1 1 20 400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to

Rotary Table/Vane Style Series MSU

MSUB1 (Single vane) MSUB1-S/SE 4 x M3 x 0.5 depth 5 2 x 4.5 through 2 x M4 x 0.7 depth 8 Long groove depth 5 (Positioning pin hole) 2 x 4.5 through +0.025 0 3 x 3H9 depth 5 Adjustment bolt 2 x 4.5 through Adjustment: Max. 5.75 A port B port 2 x M3 x 0.5 2 x M4 x 0.7 depth 8 Top ported: MSUB1-SE A port B port 2 x M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

Electric Actuator

24 A (Table traveling distance) Note 2) (1.5) 7 53.5 (92) 37 65 40 (94.7) (2.4) 24 (96) [94] Stroke 39 [(41)] 20 20 27 [Origin] Note 4) Origin Note 3) 4 [2] 2 [4] 20 15 15 Motor cable (2 x 5) 65 33 40 Cable length y 250 8.7 6 20 Belt tension adjustment bolt (M3: Width across flats 2.5) 0.025 0 ( ) 3H9 depth 3 5.5 n x 3.4 11.7 4 M4 x 0.7 thread depth 7 (F.G. terminal) 34 150 D x 150 (= E)

3 Port Solenoid Valve

Bracket Mounting Procedure q Fit the bracket to the groove at the connector block (end block). w Tighten the screws (Tightening torque M3: 0.6 Nm). Tighten the screws (Tightening torque M3: 0.6 Nm). Note) The bracket can be mounted on the block with the mounting nut (Metric size: M3) only.

PF2A/PF2W

Port size Applicable model Flow rate (l/min) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Specifications PF2A703H PF2A706H Dry air Heater type 300 to 6000 l/min PF2A712H Model Measured fluid Detection type Flow rate measuring range Note 1) 600 to 12000 l/min 10 l/min 150 to 3000 l/min 5 l/min Minimum setting unit Note 1) l/min, CFM l, m3, m3 x 103, ft3, ft3 x 103

0.5

/min 0.46 m3/min 0.80 m3/min (Max.) 0.66 m3/min 0.46 m3/min 0.80 m3/min (Max.)