With Factory Installed AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)
Component Parts Note Filter guide Plug 11 PS port with plug M-5P 1 m White
Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 RS H A Manufacture of Intermediate Stroke BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut RZQ Ordering Refer to standard part number and ordering on page 10-10-2.
L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.
Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .
15 27 34 SMC 2 Cover dia 1.6 Cross section 0.34mm2 8 3.5 20.5 SYJ Manual override 34 VK M3 X 0.5 External pilot port (Only external pilot style (R)) 2-2.7 Mounting holes 25 10 (C4, C6) (M5) VZ VT 2-M2.5 X 0.45 Thread length 4 9 9.2 VT 30 20 2.1 12.5 VP 2.5 5 5.2 4.1 28 2-3.2 Mounting holes VG 4.5 29.5 10 G(PF)1/16 R port VP Rc(PT)1/8 P port Foot bracket PE port P 1 3 R VQ 14.5 11 2-2.2 Die
VZ1000-11-1DIN rail 15 Cassette Type Manifold Series SY3000/5000/7000 SY5000 Type 60 D side R P PUSH a DIN rail holding screw R P SMC Replacement parts Part No. Note Description No.
L L N'm J MJ in3 in3 Energy em3 (ee) 0.0610 m3 35.320 0.0283 28.329 1t3 N'm 0.7375 11 Ib 1t3 J 0.7375 It Ib L 0.0353 Power It IbiS hp 9al(U.S.) 3.785 gal (U.S.)
Mounting by bracket Fix the bracket to the product with the set screws M3 x 5 L (2 pcs.) as attached. The tightening torque of the set screws must be 0.5 to 0.7 Nm. Mounting by panel mount adapter Fix the panel mount adapter to the product with the set screws M3 x 8 L (2 pcs.) as attached.
Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)
(VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.) (With spring washer) ( ) 2 x 4.5 Mounting hole VEXA-18-2A Bracket (Option) Hexagon socket head cap screw M3 L = 8 (2 pcs.)
x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip included Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included Panel mount adapter + Front protection cover Front protection cover Lead wire with connector Lead wire with connector Mounting screw (with 2
Tightening of M3, M5, and M6 screws 1) M3 After tightening by hand, tighten an additional 1/4 rotation with a tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with a tool. Over tightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Under tightening can cause loose threads and air leakage, etc. 1.
Suitable screw torque (Nm) Body size M3 0.07 M5 0.3 1/8 1 1/4 1.5 3/8 4 1/2 10 15-8-6 Flow Control Equipment Precautions Series ASN2 Handling of One-touch Fittings Caution Selection 1. Refer to page 15-1-11 for One-touch Fitting. Warning 1.
Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B
Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)
P A B C D G J M N Q R S T U V B AM50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AM60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.
P A B C D G J M N Q R S T U V B AMD50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AMD60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.
Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.