Slider Type Ball Screw Drive/11-LEFS Series

. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

CLK1

Step 3) Screw in the accessory unlocking bolt (hexagon socket headcap screw 32: M3 x 8l, 40: M4 x 8l, 50: M4 x 8l, 63: M5 x 10l). 1. Piping port position, switch rail position, and by-pass piping position can be selected by the part number. However, if there is an error in ordering and changes to the positions are required, please note the following. a.

HRX-OM-T004

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS090 Series 5-14 HRX-OM-T004 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-R028

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

Fieldbus system (DeviceNet compliant)

(Only for EX510-S 02 ) : Only mounting direction of the SI unit to the mounting bracket is different between EX510-S A and EX510-S B. Mounting direction can be changed from horizontal to vertical by changing the screws which construct the mounting bracket.

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

A

Via Garibaldi 62 I-20061 Carugate Milano, Italy TEL: 02-9271365 FAX: 02-9271365 MEXICO SMC Corporation (Mexico), S.A. DE C.V. Carr.

HRX-OM-M091

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS Series 5-14 HRX-OM-M091 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-Q033

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-Q033 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-S010

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS100/150 Series 5-14 HRX-OM-S010 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

25 60 Bracket B (Part no.: ZS-50-B) 49 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no.: ZS-31-B) 5000 (38.6) Brown 45 2: White 1: Brown 30 White 15 Blue 4: Black 3: Blue Black M12 (Part no.: ZS-31-C) (31) 5000 Brown 45 23.5 When used as a switch output device 30 White No.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

to left Option Body size Port size Symbol Nil Description Applicable model 40 50 60 80 90 2 1 02 03 04 06 10 12 14 20 4 1 4 3 B 8 3 With bracket ALF400 to 600 1 1 2 2 1 Metal case with a level gauge X208 ALF400 to 900 2 1 4 3 1 1 1 2 4 1 Line pressure (MPa) 2 1 Note 1) Tank pressure is removed when line pressure is stopped.

MXU

30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.

MXU

(Refer to the figure below.) 0.061 0.053 0.062 34 20 0.076 0.066 0.074 38.5 25 0.076 0.066 0.074 41 30 0.047 0.041 0.109 28.5 5 0.047 0.041 0.109 31 10 0.080 0.069 0.169 36 15 MXU10 9.5 0.080 0.069 0.169 38.5 20 0.103 0.089 0.212 44 25 0.103 0.089 0.212 46 30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Parallel Style Air Gripper Series MHZ

27.6 0.05 35 18.6 (34.6) 2 x M5 x 0.8 thread depth 8 (Mounting thread) 4 x M5 x 0.8 thread depth 10 (Mounting thread) Prepared hole dia. 4.3 through (Mounting hole) +0.030 0 depth 4 4H9 7.5 0.02 8 0 0.1 (58) 30 42 32 MHZ 16.8 0.02 MHF MHL 29 +0.052 0 depth 3 21H9 When closed 16.3 0 0.7 When open 26.3 +2.2 0.2 18 20 43.5 MHR 84.8 MHK 2 x M5 x 0.8 thread depth 10 (Mounting thread) MHS M5 x

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

KA

KAU23-M5 38 9.6 15.5 34.5 9 M5 X 0.8 M6 X 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 9.6 1 8 KAU23-M6 KAU23-U01 11 39.5 KAU04-M5 4 M5 X 0.8 M6 X 1.0 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 42.5 KAU06-M5 M5 X 0.8 M6 X 1.0 39 2.2 2.2 12 KAU06-M6 43 13 17 12.8 1 8 3 8 KAU06-U03 46 45 43.5 39.5 17 14 12.8 KAU06-U01 13 6 1 4 39 KAU06-U02

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAU23-M5 38 9.6 15.5 34.5 9 M5 0.8 M6 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 1 8 KAU23-M6 KAU23-U01 11 9.6 KAU04-M5 M5 0.8 M6 1.0 39.5 4 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 KAU06-M5 M5 0.8 M6 1.0 42.5 39 2.2 2.2 13 KAU06-M6 43 13 17 1 8 KAU06-U01 3 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 14 6 Uni thread 1 4 KAU06-U02 39