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Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal

Metal Seal/Rubber Seal Series VQ Body Ported

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Programless Controller Series LECP1

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) Cable length(L)[m] 1 3 5 8 A B C (17.7) (17.7) 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

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Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

AC Servo Motor Driver (SSCNET /H Type)

Parameter Configuration using Setup software (MR Configurator2TM) 16 6.1 Setup software (MR Configurator2TM) . 16 6.1.1 Installation Method . 16 6.2 Basic driver set-up for Initial Test Drive . 16 6.2.1 Start up the Setup software (MR Configurator2TM) . 17 6.2.2 System Settings . 18 6.2.3 Model Selection . 18 6.2.4 Driver ON LINE Check . 19 6.2.5 Help Function . 19 6.3 Parameter setting (

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 6 4 5 6 6.5 7.5 8 9 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 1 4 41 49 50 63 62 93 91 37.5 17 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 1 11 6 11 17 21 30 35 45 12 13 8 3 8 M12 1 46.2 39.5 17 16.2 19 19 14 3 8 10 M15 1 16 48.8 41.5 17 18.8 19 22 17 12 3 8 18 51.3 44.5 17 19.3 22 24 19 M17 1 Bulkhead union: KFE Applicable tube (mm) Effective orifice (mm 2) Mounting

Air Cylinder Series MB

22 27 32 41 41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21 26 31 39 39 79.5 69.5 Note 1) When using cotter pin, flat washer is used together.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

17 18 21 22 21 22 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 22.4 25.2 6.2 12.3 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 12.3 15.5 15.5 20.6 20.6 27.6 11.3 Note 1) Reference dimensions 27.6 Note 1) Reference dimensions 550

CXS

Refer to page 18.

HRX-OM-X037

Required facility water system (for water cooled type) Table 3-1 Heat Radiated Heat Facility water specifications Model Radiated kW HRL100-W*-40 Approx.18 Refer to 9.1 Specifications.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Rubber seal 1 2 3 4 Note 1) Refer to p.2.10-18 for Inch size One-touch fitting.

Vacuum Unit

Number of Manifold Stations that can be Operated Simultaneously in page 18.

CLA

1 14 40 " 56.5 15 25 SO 226 a 11 6 13.5 18 150 92 180 72 315 80 15 Series eLA Dimensions Rear Flange Type/CLAG Name plate \0 indICate locl

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. Each product is not assembled.

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. * Each product is not assembled.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Valve Direction: Single Solenoid Coil on Opposite Side of A and B Ports, Stations: 18, A, B Port Size: N3 (One-touch Fitting for ø5/32"), P, R Port Thread: N (NPT)

Valve Direction: Single Solenoid Coil on Opposite Side of A and B Ports, Stations: 18, A, B Port Size: One-touch Fitting for ø5/32", P, R Port Thread: NPT

0.55

Note 2) Refer to page 41.