LUBRICATOR

SPECIFICATIONS Model AL10-A AL20-A AL30-A AL40-A AL40-06-A AL50-A AL60-A Port size M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 Air Fluid 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure Ambient and fluid temperature -5 60 (Should be no freezing) 1/430 3/840 1/250 15 Min. operating flow Note1) L/min(ANR) 50 1/430 3/840 4 190 220 Bowl capacity cm3 7 25 55 135 Class 1 turbine oil (ISO VG32)

ZSE30A(F)/ISE30A

(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats

Digital Pressure Switch

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).

PFxx-OMU0002

Product number Suitable screws Tightening torque Thread depth PF3A703H Equivalent to M4 1.5 Nm 10 7 PF3A706H Equivalent to M5 3 Nm 10 8 PF3A712H Equivalent to M6 5.2 Nm 10 9 Prepared by the user.

HRX-OM-R026

C, use 15% aqueous solution of ethylene glycol. Otherwise it may cause icing of the fluid. HRSH Series 3.5Fill of circulating fluid 3-29 HRX-OM-R026 Chapter 3 Transport and Setting Up 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

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Port Thread Optional Specitications Standard specif icalion CE marked . 17. 18. 19 For manifold mountinq 2. 3. 15 CE marked DeviceNet comoatible 4,5.6.8. 14 CE marked 1 6 oreset tvoe 4 , 5 . 7 , 1 0 DeviceNet comoalible 5. 6, 8. 14 1 6 Dreset tvDe 5.7.10. 16 0 1s hiqh speed response Digital input type Reverse output 1 2 . 1 3 CE marked lar manilold mountinq 3. 15 CE rnarked 0.1s high speed

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Compressed Air Preparation Filter

A B C D E EE F G H J K Applicable model Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AFF/AM/AMD/AMK20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AFF/AM/AMD/AMK30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AFF/AM/AMD/AMK40 Part no.

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

1 15-9-41 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

SFOD-OMT0009CN

AREA 15 (OUT10) 3) 35 SETON ON ON(INP1INP2AND) 16 INP INP ON INP ON 1) 36 SVRE ON ONON 2) EMGOFF 17 *ESTOP 2) 37 1OFF (*ALARM1*ALARM4OR) *ALARM 18 -COM1 DC24V0V OUT0OUT7 19 -COM1 38 -COM1 20 -COM2 DC24V0V OUT8BUSYAREASETONINPSVRE*ESTOPALARM 39 -COM2 40 -COM2 1)ON SVRE ON 20 2) 3)BUSYAREA I/O2BUSY1 BUSY4AREA1 AREA4 41 No.SFOD-OMT0009CN-B (2) I/O2 No. 1 +COM3 DC24V24V BUSY1BUSY4AREA1AREA4INP1INP4

EtherNet/IP TM Compatible Fieldbus System

Input unit ERR LED Refer to fault is ON No. 15. Corresponding Refer to fault GW unit COM_LED No. 16. is OFF. Input unit LED Refer to fault does not turn ON. No. 15. Input unit LED Refer to fault and the input data No. 15. do not match. 66 No.EX-OMS0014-A Troubleshooting Fault No. 1 Fault Possible cause Investigation method Countermeasures Tighten the power supply cable connection.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

High Purity Chemical Valve

Port size 1/4 Symbol 02 Construction q e w Description Material Parts list R P No. 1 Actuator section PPS 2 Body PFA r 3 Diaphragm PTFE 4 End plate Stainless steel 479 Series LVA Dimensions P R 30 41 26 A M5 x 0.8 Pilot port (3 x NPT1/4) 3 x Rc1/4 Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2 x M5 x 0.8 Depth 6 20 480 Manually Operated Integral Fitting Type/Threaded Type Series

3

Seal VCW20-15-6 Note) Please order separately. 237 A

Clean Air Module

/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103 85 13.2 34.8 3 (41) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

DOC1023125

Actuator mounting A L Model Bolt size A L [mm] [mm] EQFS25 M4 4.5 24 EQFS32 M5 5.5 30 EQFS40 M6 6.6 31 15 - Body mounting example For bottom of housing B Body mounting reference plane Positioning pin position (Mounting reference plane) Body mounting reference plane Positioning pin position (Mounting reference plane) Positioning pin position (Bottom of housing B) Positioning pin position Body

High Vacuum L Type Valve

XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

ZB-OM00301

M5 Q1 +COM N.C.