XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

2/3 Port Valve for Various

Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

JXCx-OMT0001CN

No.JXC-OMT0001CN-C 4 TM) (EtherNet / IP // JXC93 Series 1. . 5 2. . 7 2.1. . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 1 . 11 (2) . 12 (3) . 13 3.6 . 14 1 . 14 (2). 17 (3) . 19 3.7 JOG . 20 (1) . 20 2 . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 3 . 24 (4) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26

IIIIIII

(o) 3.1 0 (88) 14 56 (130) 13 88 (1 10) 16.35 (180 (a w" 'Air (Lubricated) Any non-flammable, non-toxic, non-corrosive gases except oxygen Liquid Oil or non-corrosive liquids within specitied pressures SMC Mechanical Valves have been designed to meet gcnera{ iMustrial standards and are capable of long, trouble{ree life under stringent operating conditions.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

Mechanical Valves Series NVM, NVFM, NVZNI

(o) 3.1 0 (88) 14 56 (130) 13 88 (1 10) 16.35 (180 (a w" 'Air (Lubricated) Any non-flammable, non-toxic, non-corrosive gases except oxygen Liquid Oil or non-corrosive liquids within specitied pressures chanical Valves have been designed to meet gcnera{ iMustrial standards and are capable of long, trouble{ree life under stringent operating conditions.

Platform Cylinder Series CXT

Long Stroke (mm) X Y Z Bore size (mm) Stroke range (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 528 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4 x M8 x 1.25 4 x 8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4 x M10 x 1.5 depth 15 (N) T PA T

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 528 Series AS Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions AS-FE KE Reference dimensions Note 1) Dimension for AS1000-M5

HRL

The cooling capacity required for the oscillator is, 20 [kW] 6 [kW] = 14 [kW] Considering a safety factor of 20%, 14 [kW] x 1.2 = 16.8 [kW] r Calculate based on the laser output. Laser output power 6 [kW], conversion efficiency 30% The oscillators power consumption is, 6 [kW] 0.3 = 20 [kW] Example 2: When the heat generation amount in the users equipment is not known.

Compact

14 2 x 3.4 (Through holes for mounting) 17 37.4 11.5 2 x M3 x 0.5 (Pilot port) 32.5 + Stroke 34 + Stroke 31.5 7.7 11.5 23 24.5 + Stroke 16.3 + Stroke 14.4 23 (37.4) 2 x M3 x 0.5 depth 2.5 1.5 8 +0.1 6 0 depth 2.5 Auto switch 14 MXZ12R(Pilot port location: Right) MXZ12L(Pilot port location: Left) 2 x M3 x 0.5 (Pilot port) 2 x M3 x 0.5 (Pilot port) 16.3 + Stroke 16.3 + Stroke 7.7 7.7 Auto

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

3/5 Port Solenoid Valve

Caution Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Combinations of Blanking Plate Assembly and Manifold Base Body ported Base mounted Manifold gasket and screw assembly VK300-41-1A VK300-41-2A Common SUP/ Common EXH Common SUP/ Individual EXH Type 40(VV3K3-40): Base mounted (A port bottom ported) Type 20(VV3K3-20): Body ported (A port top ported) Type 42(VV3K3-42):

Micro Mist Separator Series AFD20/30/40

23 26 25 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 G 27 40 54 54 P 57 73 73 E 18 16 17 14 F 30 41 50 50 D 40 53 70 70 A 40 53 70 75 B 97 129 165 169 C 10 14 18 20 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specifications Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B B 97 142 178 182 B AFD20 AFD30 AFD40 AFD40-06 137 173 177 162

3

35 26 18 13.6 2.7 depth 14 3/8 28 22 32 40 50 4.5 5 1.5 78 54 30 60 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 3/8, 1/2 34 30 42 48 58 4.5 5 1.5 98 71 38 68 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 1/2, 3/4 44 36 48 58 70 5.5 7 2.0 124 92 46 77 62.6 57.6 23.0 41 42 63 48 28 18.0 3.5 depth 14 3/4, 1 104 74 31 52 39.5 1 1/4, 1 1/2 PF3W721/521 108 76 56 91 76.6 71.6 28.5 54 33 54

Speed Controller with One-touch Fittings

36 44.1 45.1 9.8 10.1 12.8 11.5 12.8 15.7 16.1 12.7 3.3 5.5 9.1 11 15.4 8.8 13.7 12.7 13.7 17 18 17 18 21 21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 22.8 12 4.3 8 19.3 22 25 12 20.5 4.3 8 25 28 33 14 26.2 Note) Reference dimensions The hexagon lock nut can be fastened by hand.

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMV0017 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

XLDV Series

All Rights Reserved 14 XL-OMM0005-A

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

3 @2 @0 #3 #4 #5 1212 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 17 18 20 21 22 23 24 26 27 28 29 33 34 38 39 40 41 42 43 Description Material Note Aluminum alloy Aluminum alloy Special resin Aluminum alloy Aluminum alloy Aluminum alloy Special resin Special resin Special resin Stainless steel Sintered iron material

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.