Series For manifold type 31, S31, 32, S32 5 port (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 Electrical entry 24, 12 VDC 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC E: Push-turn locking lever type Grommet L plug connector M plug connector M8 connector WO: Without connector cable M: With lead wire (
Coil type Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate type, type 41, S41, 42, S42 manifold Power saving circuit is not available for W type.
: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.
External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.
One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.
VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm 5-3-26 3 Dimensions VPA4150-Bottom ported SA VA SA 4-Rc 1/8 pilot port (5-Rc 3/8, 1/2) 4-9 mounting hole (11)
mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.
mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.
mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3
Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.
) r Body (Material: A6063) Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12
Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 63 for size 10.
Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.
IP40 050 -1070 () 3585% RH() AC1000 V50/60Hz1 5 M(DC500 V) 2%F.S.(25 ) 3 2.7 3 m / 2 0.15 mm 0.8 mm CERoHS M5 R06 R07 M50.8 6 1/4 inch ONBR SUS304 PBT (3 m) 41 g 38 g 7 g 3.8 g -12No.PS-OME0003CN-F [V] A B C 0-101kPa 0 -101 kPa 10.1 kPa -101101kPa -100 kPa 101 kPa 0101kPa 0 101 kPa -10.1 kPa -01MPa 0 1 MPa -0.1 MPa -13No.PS-OME0003CN-F PSE53-M5 PSE53R06 R07 (D) PSE53-
(This product will continue operation.) (12) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.
Adjusting screw width across flats Lock nut A tightening torque Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Width across flats (mm) 5 5 6 8 8 Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Tightening torque (Nm) 1.2 1.2 2.1 3.4 3.4 5. Do not scratch or gouge the external surface of the cylinder.
5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6
6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm
SGH Ex. 2) 3 port valve: Switching nozzle 12 VNC VNH Port 12(P1) (Pilot air SUP port) Nozzle Port 12(P1) (Pilot air SUP port) 3 1 2 VNH VNH Tank Coolant pump VND Switching nozzles on supplying coolant liquid.
R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R (A) 10 5 (mA) 30 12-3 M5 9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011