MG

1 32 1 10 50 100 200 0.2 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-14 Compact Guide Cylinder Series MGP Horizontal Mounting (Slide bearing) MGPM12 to 100 (13) l = 50 mm, V = 200 mm/s (14) l = 100 mm, V = 200 mm/s 50 50 100 100 100 100 80 80 80 80 50, 63 50, 63 50, 63 MX 50, 63 32, 40 32, 40 32, 40 10 10 MTS 32, 40 25 25 20 20 MY 5 5 Load weight m (kg) Load weight

VM

Push button VM1010-4N-32 VM1010-4NU-32 VM1110-4N-32 VM1110-4NU-32 JIS Symbol/2 port 3 port Panel mounting hole 0.5 MPa supply Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4NU-32 VM1010-4NU-32 VM1110-4N-32 VM1010-4N-32 Bottom ported 3 port 2 port 6 N F.O.F.

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

Integrated Controller

For details, refer to pages 29 to 32.

Basic Type/Direct Mount Type

CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM

One-touch Fittings Series KQ2

Weight (g) D L A M 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 7 32 32 24 19 17 14 4 9 8 9 7 2 9.6 34.5 18.5 17.5 17 1 8 15.5 2.5 9.2 34 10 34 34.5 34.5 36.5 37 39 40 41 42.5 5 32 16 17.5 3 10.4 11.4 10.7 18.5 18 18.5 18 3 16 16.5 3.5 1 4 12.5 17 4.6 5 16 14 18.5

SMC Pneumatic Clean Series

38 46 F 2 2 2 2 B 40 44 53 61 E 12 14 18 25 Bore size 20 25 32 40 76 92 104 128 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 Note) End boss is machined on the flange for E.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Table of Contents

No jump destination 32 No label found at the program designated jump destination. Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT.

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 Without/with auto switch Long stroke CD Bore (mm) CT CU CW CX CZ RR L1 Metric Inch B CL L A Metric Inch 24 25.5 28.5 32.5 12 16 20 25 21.5 21.5 22.5 24.5 32 32 41 44 65.5 66.5 82.5 89 59.5 60.5 73.5 79 13.5 13.5 14.5 15 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 6 6 9 10 3/16 3/16 5/16 3/8 5 5 8 10 Note on dimensions

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

CQS

Rear flange Long stroke Standard stroke (mm) Without auto switch With auto switch Without/with auto switch Long stroke (mm) Bore (mm) Standard stroke (mm) B L L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 24 25.5 28.5 32.5 13.5 13.5 14.5 15 32 32 41 44 51 51 63.5 67 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 14 15.5 18.5 22.5 3.5 3.5 4.5 5 26 26 32 35.5 35 to 100 35

MGP

39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8 Rc1/8 Rc1/4 Rc1/4 32 38 34 39 32 40 50 63 MGF 91 69 14 10 14 M6 M8 X 1.25 M8 X 1.25 18 25, 50, 75, 100, 125, 150, 175 ,200 97 69 14 11 12 M8 M10 X 1.5 M10 X 1.5 21.5 CY1 102 74 16.5 13.5 16.5 M10 M10 X 1.5 M10 X 1.5 28 WA WB Bore (mm) Standard stroke

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

SMC Pneumatic Clean Series

S + Stroke FX FZ Relief port 20, 25 F T H ZZ + Stroke Z + Stroke Standard port 20 to 32 FY 45 4-FD Relief port (32, 40) 40 (mm) FX 66 52 40 40 34 B 10.7 7.5 7.5 7.5 DL FT 22 17 17 13 B1 FD F AL FZ G H1 H2 E C2 K I HC H FY D B2 A MM Bore size 0 41 32 32 26 20-0.033 40 32 25 20 60 60 60 4 4 4 16 13 13 13 7 7 7 5 24 46.5 37.5 33.5 28 21 19.5 19.5 15.5 24 22 22 18 14 12 10 8 47.3 37 37 30 10

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Compact Cylinder with Air Cushion Series RQ

H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end

Stainless Steel One-touch Fittings Series KG

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 27 24 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.