REC

+Stroke Mounting hole 2-7 Standard port Relieving port B (mm) Bore size FT FX FY FZ B1 D A AL B B2 F G H E Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 FX 20 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 20, 25, 32 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to 1000 26 36 40 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to 1000 32 S

Electric Slide Tables

40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 13 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control

Hygienic Design Cylinder Series HY

1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 M16 x 2.0 depth 21 M20 x 2.5 depth 27 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 18 18 20 26 32 32 37 42 12 14 18 25 30 32 40 50 3 3 3 3 3 3 3 3 2 2 2 2 2 2 3 3 13 13 10 10 10 10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

x 0.8 68 14 17.5 14 20 13 8 15 39.5 76 26 CY1RG50 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 30 42 60 41 10 50 113 176 82 CY1RG63 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 32 48 70 47 10 60 121 188 94 8-15-43 43 Series CY1R Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 6 10 15 20 25 32 40 50 63 D-A9 9 13 8 5 6 4 D-M9, D-F9W 5 (2.5)

CG5-S

12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500

LX

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Air Slide Table Series MXQ

56.5 66.5 91.5 116.5 J 34 34 42 58 70 110 135 I 12 12 14 15 13 17 17 NN 2 2 2 3 3 4 5 H 32 32 40 39 36 36 G 18 18 20 9 23 12 N 4 4 4 6 6 8 10 HA 32 32 40 39 39 72 72 Model F 28 28 38 34 34 36 36 GA 18 18 20 38 48 59 84 KA 117.5 142.5 NA 4 4 4 4 4 8 8 MXQ12L10 MXQ12L20 MXQ12L30 MXQ12L40 MXQ12L50 MXQ12L75 MXQ12L-100 Note) Note) Note) Refer to the bottom view of MXQ12L-40. 108 Air Slide Table

Stability of suction position,

Mounting thread size 32 to 50 ZP3E-(32 to 50)UMll M10 x 1 8 to 10 ZP3E-(32 to 50)BMll 63 to 125 ZP3E-(63 to 125)UMll M16 x 1.5 13 to 15 ZP3E-(63 to 125)BMll Note 1) When mounting and removing the seal washer, rotate the set screw while the seal washer is being held.

Cylinder with Lock

Overall length: h + H + S + (2 x Stroke) [mm] h + Stroke S + Stroke f 10.2 10.2 10.2 l f 10.2 l + Stroke ZZ + (2 x Stroke) h Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4 51 8 M6 x 1.0 50 35 32 66 65 33 49 55.5

CV/MVGQ

40 8 8 10 32 41 32 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 C J G5-S 10 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 CV 14 10 11 53 50 53 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 Dimensions by Stroke

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Refer to section 13.1.2. 13 2 13.

NCA1

0 1/2 1.57 27/64 3.32 1 3/8 2.34 4.64 2.72 9.38 (in) Bore (in) b c d SN NT ND TN 150 (1.5) 1 1/2 1.25 1.80 2 1/4 1/4-20 9/32 5/8 200 (2) 1 21/32 1.64 2.19 2 1/4 5/16-18 7/16 7/8 250 (2.5) 1 21/32 1.64 2.19 2 3/8 3/8-16 19/32 1 1/4 325 (3.25) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 1/2 400 (4) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 3/8 37 Series NCA1 Medium Duty Air Cylinder Adjustable Stroke Return

CG5-S

12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500

Refrigerated Air Dryers Series IDF/IDU

[200 VAC specification] [100 VAC specification] Power cable outlet (17) Power cable (Length: approx.1.9 m) Dimensions (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 Rc 3/8 226 410 51 232 138 24 327 240 15 125 73 31 36 154 67 304 33 21 330 473 Rc 1/2 453 13 283 275 498 455 15 270 42 230 32 15 240 31 80 80 284

Floating Joint

(mm) d: Nominal thread size Model M22 x 1.5 M26 x 1.5 H 13 16 32 41 B C 37 47.3 Order no.

Plate Cylinder

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Size 25 32 40 50 63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 8 10 10 14 14 CL 26 42 54 64 72 CR 5.3 6.4 8.4 10.5 13 CT 9.5 11 14 17 20 CX 9 11 13 16 16 CZ 8 10 10 14 16 DL 26 42 54 64 72 DR 5.3 6.4 8.4 10.5 13 DX 18 22 26 32 32 DY 9 11 13 16 16 DZ 8 10 10 14 16 DT 9.5 11 14 17 20 Applicable pin

Stainless Steel 316 Fittings

(inch) L Model 1/8" (3.18) KFG2N-01 7.8 8 1.9 H 5/32" (4) KFG2N-03 7.7 8 1.9 1/4" (6.35) KFG2N-07 9 12 4.6 5/16" (8) KFG2N-09 10.1 14 6.7 L 3/8" (9.53) KFG2N-11 11.7 17 10.7 1/2" (12.7) KFG2N-13 12.8 19 13 24 Series KFG2 Specific Product Precautions 1 Be sure to read before handling.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14

MHZ

40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.