LC-OM089xx

64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Fig.2-1 P-clip Fig.2-2 U-clip Fig.2-3 Soldering Country Telephone Country Telephone *Websites Kingdom Ireland (351) 1-403 9000 United SMC Corporation www.smcworld.com SMC

Series MLGP

Manually unlocking For 20 to 32 Dust cover holding bolt Dust cover Manual unlocking bolt Manual unlocking bolt Lock ring Locking direction Locking direction Lock ring Rod side Head side Rod side Head side MLGP--F: Extension locking MLGP--B: Retraction locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15L of more commercially available) into the lock

Compact Hydraulic Cylinder Series CH
KGB

Bore size (mm) NTH-025 20 17 19.6 M10 x 1.25 16.5 6 NTH-032 25 19 21.9 M12 x 1.25 18 7 NTH-040 32 22 25.4 M16 x 1.5 21 10 NTH-050 40 27 31.2 M20 x 1.5 26 12 NTH-060 50 32 37 M24 x 1.5 31 14 NTH-080 63 41 47.3 M30 x 1.5 40 17 NTH-100 80 55 63.5 M39 x 1.5 54 20 NTH-125 100 70 80.8 M48 x 1.5 69 26 Weights Unit: g Standard stroke (mm) 5 Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 221

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Electric Actuator / Slider Type 《 AC Servo Motor 》

LECSA LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 20 12 6 24 16 8 30 20 10 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less

Process Pump

15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4 MPa 100 SUP = 0.3 MPa SUP = 0.3 MPa SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Pin description 1 DC(+) 2 NC/Analog output 3 DC() 4 OUT 31

SI unit for EtherNet/IP TM

(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED display LED display to indicate the status of the SI unit. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.

Series VCS

1 5 1 0 25 20 1 5 30 25 25 2.

Series PF2W Digital Flow Switch For Water

(Fixed SI unit [L/min, or L, m3 or m3 x 103] will be set for switch types without an unit switching function.)

E-MY2B_E_A

Phone AUSTRIA / (43) 2262-62 280 ITALY / (39) 02-92711 BELGIUM / (32) 3-355 1464 NETHERLANDS / (31) 20-531 8 CZECH REP. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30)

180° Angular Style Air Gripper Series MHY2/MHW2

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 100 30 0.4 0.4 80 0.3 0.3 0.2 20 60 MHZ 0.2 40 10 20 MHF 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm) MHL MHR Confirmation

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 32 16 2 x M3 x 0.5 through 6.5 counterbore depth 5 (Same on the opposite side) 3.4 through 3 3 45 5.5 45 M2.5 x 0.45 x 6 L (Hexagon socket head cap screw) M3 x 0.5 x 12.5 L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2 x M3 x 0.5 through Steel ball Plug 2 x M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

PSE540/560

: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 3.4 01: R 1/8 N01: NP T1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 16-3-26 5 Pressure Sensor For General Fluids Series PSE560 How to Order ZSE ISE Pressure sensing range PSE 0 1 3 4 Positive pressure

IDX-OM-W013

(Follow the Operation Manual of the equipment.) 5-1 Cause and countermeasure of errors IDU Series 5 2 IDX-OM-W013 Air Dryer 6 References References 6 6-1 Specifications Model Specification IDU3E-10/20 IDU4E-10/20 IDU6E-10/20 50Hz 0.32 0.52 0.75 Air Flow Rate m3/min (ANR)(Note 1) Rated Condition 60Hz 0.37 0.57 0.82 Operating Pressure 0.7MPa Inlet Air Temperature 55oC Ambient Temperature 32oC

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model Note) ZPU-X11 ZC(D)UKD10 ZC(D)UKR10 SP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 12 18 32 13 7 32 13 9 12 15 18 31 12 2. 6 26 10 2. 6 31 12 4. 8 26 10 4. 8 31 12 7 26 10 7 31 12 9 26 10 9 12 15 18 ZCUK DQ HQ HP AMJ ZP ZC(D)UKD16 ZC(D)UKR16 AMV DQ HQ HP ZC(D)UKD20 ZC(D)UKR20 ZP 53 15 36 16 37 28 20 44 43 29 16 37 53 38