Stations: 3 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N9 (5/16" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 3 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 5/16" One-touch Fitting, Mounting Method: DIN Rail Mounting

Stations: 3 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 5/16" One-touch Fitting, Mounting Method: DIN Rail Mounting

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Hydraulic

36.5 42 36.5 43.5 78 88 CH2F 41.5 36.5 41.5 36.5 41.5 76 86 50 CH2H 42 36 42 36 42.5 77 87 CH2E 48.5 43 47 43 50.5 85 95 CH2F 46.5 43 46.5 43 48.5 83 93 63 CH2H 48.5 43 47 43 50.5 85 95 CH2E 58.5 55.5 57 55.5 59 93.5 103.5 CH2F 56.5 55.5 56.5 55.5 57.5 92 102 80 CH2H 59 55.5 57.5 55.5 59.5 94 104 CH2E 66.5 67 66.5 67 69.5 104 114 CH2F 65.5 67 65.5 67 68 102.5 112.5 100 CH2H 67.5 67 67.5

Intrinsically Safe Valve

(EA) 5 1 (P) 3 (EB) 8 One-touch fitting 10 One-touch fitting 53-SY9000 3-position exhaust center Warning 2 (B) (A) 4 Note) If a resin tubing is used, take precautions against static electricity. 12 One-touch fitting 4 Note 1) One-touch fitting (Inch size) Note) (EA) 5 1 (P) 3 (EB) Symbol Port size Applicable series 3-position pressure center N3 N7 N9 N9 N11 N9 N11 5/32" One-touch fitting

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

SYA3000/5000/7000

5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order One-touch fitting (Inch size) A, B port size Thread type Thread piping Rc Nil Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 M5 x 0.8 One-touch fitting for N NPT SYA3000 1 8 1 4 Except for M5 1 4" One-touch fitting for NPTF T 5 32" One-touch

5 Port Air Operated Valve SYA3000/5000/7000 Series

5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch

Fluoropolymer Piping Equipment

24 24 9 18 21 21 43 43 28 28 17 26 44 44 54 23 23 39 3.6 LQ1T41-R12 6 12 12 29 26 54 39 3.6 LQ1T41-R22 10 6 12 6 24 20 24 9 18 21 21 43 38.5 43 28 23 28 3.6 LQ1T41-R23 6 6 12 7 20 29 14 28 17 26 44 44 54 23 39 3.6 LQ1T41-R26 12 3 12 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 1.8 LQ1T41-R32 6 12 6 15 24 15 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T41-R34 3 12 3 1.8 LQ1T51-R2 19 10 19 7 29 20

Table of Contents

Description Cover Case Gasket/Seal Element Material Zinc die-casted Aluminum die-casted NBR Polyester, ABS AMJ Element size (mm) 43 x 42 x 12 43 x 40 x 22 Applicable filter model Part no. EJ001H-030N EJ101H-030N ZFA100 ZFA200 Misc.

ZP

6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 Series ZPT Vacuum Pad: Vertical

A

17 6 16 12 MAX. 20 ML2B40 4.5 15 31 9.5 94 81.5 67.3 43 17 6 16 12 MAX. 25 Part No.

JIS Standard Hydraulic Cylinder

36.5 43.5 41.5 78 88 CH2F 41.5 36.5 41.5 36.5 41.5 76 86 50 CH2H 42 36 42 36 42.5 40 77 87 CH2E 47 43 48.5 43 50.5 47.5 85 95 CH2F 46.5 43 46.5 43 48.5 83 93 63 CH2H 47 43 48.5 43 50.5 47.5 85 95 CH2E 57 55.5 58.5 55.5 59 55.5 93.5 103.5 CH2F 80 56.5 55.5 56.5 55.5 57.5 92 102 CH2H 57.5 55.5 59 55.5 59.5 56 94 104 CH2E 66.5 67 66.5 67 69.5 65 104 114 CH2F 100 65.5 67 65.5 67 68 102.5

ZP

(36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Table of Contents

Please consult with SMC for availability. 15-4-43 9 Tubing Series T Variations K Tubing O.D. Tubing O.D.

ZP

(36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

R (NPT) Port size A N L2 L2 LQ2L21-M LQ2L22-M LQ2L23-M LQ2L24-M LQ2L31-M LQ2L32-M LQ2L33-M LQ2L34-M LQ2L35-M LQ2L36-M LQ2L41-M LQ2L42-M LQ2L43-M LQ2L44-M LQ2L51-M LQ2L52-M LQ2L53-M LQ2L54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 (A) 1/4 1/8" 20.5 (M) (M) 38 19.9 19 24 18 VC 1/4" 18 H (E) VDW L1 43 Class 2, 3 1/4" 22 42.5 VQ 26.2 22 28 24 43 3/8" 21.5 VX2 42.5 52 51 52 51 59 58 59

Table of Contents

L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5 93 98 98 L2 48 61 76 76 99 104 124 124 129 L2 61 76 76 99 L3 43 57 57 75 L3 57 74 74 95 L3 57 74 74 95 L1 41.5 55 55 72.5 L2 43 57 57 75 L4 43 57 57 75 L1 41.5 55 55 72.5 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50