Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Component Parts Description Sleeve Studded body Stem Material C3604 C3604 PP Note Electroless nickel plated Electroless nickel plated No. 1 2 3 Applicable tubing Applicable fitting size D q w e C M F D E B A 192 B M Series Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times.

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

Support Guide/11-LEFG Series

0.08 C side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02 LEFG16 0.05 0.03 LEFG25 0.05 0.03 11LEJS LEFG32 0.05 0.03 0 0 100 200 300 400 500 25ALEFG40 0.05 0.03 Load W

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

SI Unit Output Polarity: Negative Common, Stations: 8 Stations

SI Unit Output Polarity: Positive Common, Stations: 8 Stations

SI Unit Output Polarity: Positive Common, Stations: 6 Stations

Stations: 1 Station, Manifold Type: LD1 (Lead Wire Kit Cable 1.5m), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 12 Stations, Manifold Type: LD2 (Lead Wire Kit Cable 3.0m), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 4 Stations, Manifold Type: LD2 (Lead Wire Kit Cable 3.0m), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 6 Stations, Manifold Type: LD0 (Lead Wire Kit Cable 0.6m), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 10 Stations, Manifold Type: LD0 (Lead Wire Kit Cable 0.6m), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 3 Stations, Manifold Type: LD2 (Lead Wire Kit Cable 3.0m), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 5 Stations, Manifold Type: LD1 (Lead Wire Kit Cable 1.5m), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 6 Stations, Manifold Type: FD1 (D-sub Connector 25 Pin 1.5m), Manifold Mount Style: D (DIN Rail Mounting)