CJ5-S

to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100

CJ5-S

+ 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100 45 22 22 32 32 79 21 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint

MG

97 20 12.5 40 40 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 50 50 106.5 66 5 6 4 8 M10 x 1.5 20 24 118 161 25 9.5 21 64 63 63 106.5 118 80 5 6 4 8 M10 x 1.5 20 24 161 25 4.5 16 59 End Lock Mechanism Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E HN (Max.)

One-touch Fittings Series KQ2

20 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note) ( ): Values for soft nylon.

•

ZPR10g 10 12 12 21 29.9 46 20 67 25 72 3 17 27 ( ::) 2PR02 26 '-I 26 27 ('J;) \ .2PR08 ZPR13g 13 15 12 21 29.9 46 20 67 25 72 3 1.B ( '2~4' ZPR16g 16 '8 12.5 21 .5 29 30 30.4 46.5 20 67.5 25 72.5 3.5 1.2 ZPR'1O 29 31 29 31 29 31 ZPR13 Deep type (mm) Model A 'B C D E F 1:M5xO.a 1:M6x1 Y' .,G H 1 ZPRl6 31 31 G H ..

Electric Actuators

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

MY1

26 32 43.5 60 VV 16 19 23 28 30 TT 15.5 21 22.5 35 43 WW 11 13 20 22 25 UU 16 16 24.5 24 28 XX 38 48 54 74 92 SS 3.5 4 10.5 10 13 RR 19 24 25.5 35 49 "P" indicates cylinder supply ports.

ZP

1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 5 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer Connection Male thread Pad Form Bellows

ZX

Filter unit ZX1-K1-F Without switch and filter ZX1-K1 69.4 66.2 50.4 7 11 1 20 20 41 1 51 8 Bracket B (Standard accessory) 2-3.6 (Mounting hole) 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 19 10 1 Filter M5 (or M6) (V port) Vacuum pad connection port 70 50 38 8 17 38 35.4 (Mounting hole) 2-3 (Mounting hole) 3 1 5.4 13-2-21 21 Series ZX Ejector exhaust Vacuum pad connection V port Air

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) S Bore size 102.5 101.5 45 45 20 20 NB FB 17.5 19 NN Z 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 M5 x 0.8 M4 x 0.7 D GC B F H MM GB GA C A 28 28 NA WW WA WB FC 5.5 5.5 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 29.5 29.5 4 5 M12 x 1.0 691 Air Cylinder CJ2 10-/1121-/22Head Flange (G): CJ2G, CJ2G 10112122Rubber

HRX-OM-W002

34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6

Table of Contents

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

TABLE OF CONTENTS

(Explosion Proof) Two Way and Three Way Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18-19 Series 20 (Explosion Proof) Three Way Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20-21 Series 20 (Explosion Proof / High Pressure) Two Way Normally Open . . . . . . . . . . . . . . . . . . . . . . . . . 22-23 Series 20 (Explosion

Stainless Steel One-touch Fittings Series KG

17.2 10.0 5 17 10 21 27.5 3 8 KGS10-03 21 19 39.0 26.6 8 1 2 KGS10-04 28 22 20 35 23 18 1 4 3 8 KGS12-02 KGS12-03 8 27.5 22.5 33.5 29 28 46.0 19 12 22 44.5 1 2 KGS12-04 20 10 30 60.0 22 Reference dimensions after R(PT) thread installation. 122 Stainless Steel One-touch Fittings Series KG Female union: KGF Effective orifice(mm 2) Applicable tube O.D.

Series KG Stainless Steel One-touch Fittings

17.2 10.0 5 17 10 21 27.5 3 8 KGS10-03 21 19 39.0 26.6 8 1 2 KGS10-04 28 22 20 35 23 18 1 4 3 8 KGS12-02 KGS12-03 8 27.5 22.5 33.5 29 28 46.0 19 12 22 44.5 1 2 KGS12-04 20 10 30 60.0 22 Reference dimensions after R(PT) thread installation. 122 Stainless Steel One-touch Fittings Series KG Female union: KGF Effective orifice(mm 2) Applicable tube O.D.