REC

1.25 5 8 33.5 5 Up to 700 18 15.5 13 8 13 10 41 26 20 2025 M10 x 1.25 6 8 37.5 5.5 Up to 700 22 19.5 17 10 13 10 45 32 26 32 M10 x 1.25 6 8 46.5 5.5 Up to 1000 22 19.5 17 12 13 11 45 32 26 Data 40 M14 x 1.5 8 10 56.2 7 Up to 1000 24 21 22 14 16 12.5 50 41 32 20, 25 NA NN P S TD TT TX TY TZ Z ZZ N Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 8 10 32 32 52 192 202 20 25 34.5 M26

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

32 39.5 42.5 5.4 5.4 7 10 6 8 10 12 25 29 36 40 5 5 5.5 5.5 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 6.5 6.5 9 9 7 7 10 10 4 4 7 7 0.5 0.5 1 1 3.5 3.5 5.4 5.4 5, 10 For the following bore/stroke sizes, through-hole is threaded over the entire length.

MXS

6 !7 !8 !

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

LEC-OM02904

(UVW) 6. 1. 2. 25 1. 23 2. 3. 4. 5. 6. 23 8 7 8 (2) 30 1. No.PA02 1 2. 1. 2. TM MR Configurator2 3. 3. 200V100VDC400V 400VDC800V 4. 4 5. 6. 1. 2. 7. 2 31 1. 2. 1. 2. 3. 4. 8 8 8 (2) 32 1. (UVW) 2. 1. 2. (UVW) 3. (UVW) 4. (UVW) 5. 1. 2. 6. 2 8 9 8 (2) 33 LECSS-DC400V 1. 2. No.PA02 00() 3. 1. 2. 4. 1. 2. 5. 7.

MY1

7 40.8 5.4 (Max.11) 4 20 32 5.8 45.5 3.6 6 10 RB0806 RB1007 40.8 5 (Max.11) 4 58 70 D24 38 6.5 53.5 7 12 3.5 46.7 5 (Max.16.5) 6 RB1412 RB1412 29 50 8.5 67 12 14 67.3 8 (Max.20) 88 104 4.5 6 -X 35 57 10 83 12 17 67.3 9 (Max.25) 4.5 6 RB2015 40 66 14 106 128 152 15 20 73.2 13 (Max.33) 6 5.5 Technical Data RB2015 52 77 14 129 15 26 73.2 13 (Max.38) 6 5.5 1357 MY1W Series Side Support Side support

LEH_C

4 4 10 10 PNP PNP 1P 1P 6 6 20 20 AN LECPA () AP AN LECPA NPN NPN 32 8 32 8 PNP AP PNP 40 12 40 12 (m) 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B F F 3 3 3 3 15 15 C C 5 5 5 R 20 20 R 5 ( () R R S S / P.42 7.3 <> (NPNPNP) LEHS10K3-4 NPN 6 - 4.3 3 8 2 5 1 4 7 6 1 2 3 4 5 6 7 8 ( DC24V) 7 - 5. 5.1 I/O LEC-CN5-* PLC DC24V 2) CN5 1) CN4 LE-CP-*-* () LE-CP-*S-* () CN3 CN2

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Rotary Table/

61 60 28 40 22 6 65 67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

Title not found

Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

Title not found

Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

VFS

Applicable cable: O.D. 6 to 8.

CLQ

Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

MTS

6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Rod cross section for 12, 16, 20, and 25 D-X 20Rod cross section for 32 and 40 Data With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

JXCx-OMT0061CN

A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 )

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Part no. l d B H T m H D C B d 32, 40, 50 32 KP-05 NTH-040 20 0.2 6.5 32 12 4.5 M6 x 10L 10 21 25.4 22 M16 x 1.5 6 63, 80 40 KP-08 NTH-050 9 24 0.2 44 18 4.5 M8 x 12L 12 26 31.2 27 M20 x 1.5 9 100 50 KP-10 NTH-060 11.5 26 0.2 44 22 6 M10 x 14L 14 31 37 32 M24 x 1.5 11 B series rod 63 NTH-080 17 40 47.3 41 M30 x 1.5 80 NTH-100 20 54 63.5 55 M39 x 1.5 Double clevis/Double knuckle pin 100

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled