FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

PSxx-OMM0002CN

kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

SYA3000/5000/7000

kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

5 Port Air Operated Valve SYA3000/5000/7000 Series

kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

90

100 IR1000-A Series IR2000-A Series IR3000-A Series 50 50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

LFE-OMZ0012

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the piping may become loose. The product body is made of resin.

JXCx-OMT0034CN

11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41 12.4 . 43 13.

JXCx-OMT0030CN

500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 9.CN2:TB/PC 22 - 6CN 61 1 EMG+ EMG 2 EMGEMG 3 24V + 5 4 3 2 1 4 0V 5 FG FG LEC UL , UL1310 Class2 62 AWG20 (24V0V) 60 EMG AWG20 EMG+,EMG60 8mm 23 - D (100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC) (LEC)EMG+,EMG-OPEN 24 - (LEC) LEC6 (DC24V 0V ) Ry EMG+ Ry