Clean Exhaust Filter

Graph 1 Exhaust flow rate of cylinder (Meter-out control) 300 Exhaust flow rate [L/min (ANR)] 40 250 Graph 2 Flow rate characteristics The graph shows the flow ranges recommended for each exhaust filter model.

CYV

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) IR1000-01 IR1000-01 IR1000-01 Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa 0.5 0.204 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.4 0.202 0.15 Setting point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 40 20 80 60 100 140 120 0 50 100 200

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 2-1/4 3 1 Manual override (Non-locking) 9 23 VFN212N--02-D 213 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 2-5.5 Mounting hole Pilot EXH. 177 2-1/4 3 1 9 23 Manual override (Non-locking)

VFN2000N

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1 Manual override (Non-locking

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

AC Servo Motor Driver (SSCNET Type)

Parameters will be loaded. -40- 6.8 Saving/Loading Project 6.8.1 Saving Project From the Project menu in the setup software, select Save As. Please specify location to be saved. Please enter any project name. Click Save. Project will be saved in the specified folder.

AC Servo Motor Driver (MECHATROLINK-III type)

Troubleshooting . 37 7.1 Alarms List . 37 7.2 WarningAlarms List . 40 2 - LECYU Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

SFOD-OMT0012

For LEY16RA-75, enter "LEY16RA" and select LEY16RA-100. For LEFSH (High precision type) Enter "LEFS" to search without the High precision specification. e.g.) For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300.

IDX-OM-W095

45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 MPa 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.01.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 IDFC6010 450.8MPa30 2.8 m 3/min 1.09 1.02 1.06 3.3 m 3/min 7.2 GWP 1 (GWP) GWP Regulation EU No 517/2014 Regulation (EU) No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 R410A

IDX-OM-V020

Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -40～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Without built-in magnet, Support bracket

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -40～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Without built-in magnet, Support bracket

Non-rotating double power cylinder, Bore sizes (mm): 20, 25, 32, 40, 50, 63, 80, Standard strokes from 75 to 1000mm, Port thread types: PT, NPT, G, Optional coil scraper, Auto switch capable, FLANGE (MGZ*40), ACTUATOR, MGZ GUIDED CYL, DBL POWER, M2, 40MM MGZ ACCESSORY, 1.01200 lb, NameModelBore size (mm)With end lockWith coil scraperMounting bracket Transaxial foot styleFront flange

The CA2 is available in 40, 50, and 63 bores sizes, and is RoHS compliant. Double acting, single rod; Bore size (mm):  40, 50, 63; Standard stroke (mm): 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500; Rc, NPT or G port threads; Clean series

Bore sizes: 40, 63, 100 mm; Stroke lengths: 30, 50, 75, 100; Non-rotating accuracy +/-0.08° for 40 mm bore; Non-rotating accuracy +/-0.06° for 63 mm bore; Non-rotating accuracy +/-0.05° for 100 mm bore; Auto switch capable

Bore sizes: 40, 63, 100 mm; Stroke lengths: 30, 50, 75, 100; Non-rotating accuracy +/-0.08° for 40 mm bore; Non-rotating accuracy +/-0.06° for 63 mm bore; Non-rotating accuracy +/-0.05° for 100 mm bore; Auto switch capable

The CA2 is available in 40, 50, and 63 bores sizes, and is RoHS compliant. Double acting, single rod; Bore size (mm):  40, 50, 63; Standard stroke (mm): 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500; Rc, NPT or G port threads; Clean series

Double acting, single rod, water resistant; Compact, space-saving; Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100; Standard stroke (mm): 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100; Auto switch capable