Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

XL-OMV0002

154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Trimmer Auto Switch

to 10 30 to 10 22.5 to 10 180 Angular style MHW2 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Air Cylinders (mm) Description/Series Bore size 10 12 16 20 25 32 40 50 63 80 100 Compact guide cylinder MGP 3.5 5.0 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6.0 Non-rotating double power cylinder MGZ 5.5 6.5 6.5 Air cylinder CA2 4.0 4.0 6.0 6.0 6.0 Sensor Unit D-F7K Air Cylinders (mm) Description/Series Bore

Soft Start-up Valve AV2000/3000/4000/5000

(50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal SF4 1 G 80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can

Table of Contents - Tubing

(Example) 10-TFU0425B-2 TFU0425-2-50 (100)-X3 TFU0425-3-50 (100)-X3 TFU0604-2-50 (100)-X3 TFU0604-3-50 (100)-X3 TFU0805-2-50 (100)-X3 TFU0805-3-50 (100)-X3 2 3 2 3 2 3 4 2.5 6 4 8 5 50m or 100m roll B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) TUB-12 Clean Tubing: Polyolefin Tubing How to Order Designed to be used for blow-off and washing

PF-OMN0011_C

mA ) PNP1.5 V (80 mA ) 2 1 s/2 s 3 1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 -66No.PF-OMN0011CN-C PF3W30 0.4 V ()30 ms / 2 4 7 2 /6 11 ) 5 / 12 DC1224 V10 50 mA 5P 4P (e-con) IP40( IP65) 050 () 3585R.H.() AC1000V1 50M (DC500V ) CE UL(CSA)RoHS 50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5 ) 290(7 s) 390(7 s) -67No.PF-OMN0011CN-C 0100 1 / -10110 1 3F.S

ML1C

Applicable bore A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 1114 A Hy-rodless Cylinder ML1C Series Construction #9 %7 #8 #7 %6 !0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !

PSxx-OMS0006CN

-2No.PS-OMS0006CN-G / *3) 1 1.5 3) 1 1 -3No.PS-OMS0006CN-G () () () () -4No.PS-OMS0006CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMS0006CN-G * FG (35 N () ,() *() 6 33 () () 30m DC(-)() * -6No.PS-OMS0006CN-G ( ) () CE/UKCA -5~50(5 ) * , 1015 10 1% 2053 LCD * -7No.PS-OMS0006CN-G N M5 ISE20 3 ISE20 -0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F

VCS

3 PA 0.54 13 0.8 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8: 0.40 1/2: 0.49 VCS3 3 0.80 19 0.5 5 1.0 PAX 1.4 33 0.2 7 2.1 50 0.1 10 PB 0.35 8.4 1.0 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 0.60 14 1.0 4 0.85 20 0.7 5 VCS4 1.0 4 1.4 33 0.3 7 2.1 50 0.12 10 Note 1) Refer to page 17-2-42 in model selection regarding port size and orifice size combinations

CG1x-OM0006N

3-2. 2040 , 3-2-1. 2 50 542 17 3-2-2. 1 4 1 2Assy 2 5 4. 5. 3) , 6 6. 18 3-2-3.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 5 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C

Pulse Valve

JSXFAH6-10m1-Bm JSXFAH6-10m2-Bm JSXFAH6-10m3-Bm JSXFAH6-10m4-Bm Outlet pipe dimensions A 68 108 68 108 B 173 5 213 5 173 5 213 5 Thread type G1" x 50 G1" x 90 Pipe thread (Pipe for the OUT port) 68 68 50 108 108 90 1" (ANSI) G1" G1" 1" (ANSI) 9 Pulse Valve Valve for Dust Collector JSXFA Series Dimensions: JSXFAH/Immersion Type Dimensions on the tank side A A 69 +1 0 0.3 A 0.4 ANSI 6" 168.3

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Micro Mechanical Valve Series VM1000

port 3 port 5 port 3 port 5 port 111 g (Add to 2 basic units.)

02-mgp-e

MGP20-B-PS 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR MGP25-B-PS Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR MGP32-B-PS Gasket A NBR MGP40-B-PS Gasket B NBR MGP50-B-PS Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4, $5 MGP63-B-PS

Lubrication Equipment

(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25

SL5200

40 0.24 35 4 Delivery pressure (MPa) Delivery pressure (psig) 1.0 (25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21

Stainless Steel Heat

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86