Applicable Auto Switch Model

Applicable Auto Switch Model Refer to p.5.3-2 to 5.3-75 for the detailed specifications of auto switches.

OMS0020

Position 2 The AREA signal is output for both the AREA A and AREA B set configuration. AREA B Set as AREA 1AREA 2. Position 1 AREA B Position 2 21 (2) Step Data Save Command "EU" Details Use after executing Step Data setting comand "EE".

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

60

VHS20 to 50-A . ; . ; Built-in silencer (Option) = = @ @ 2 1 (IN) 2 (OUT) IN OUT B B : : Cross section of EXH port > > 3 (EXH) EXH Option Part No.

Vacuum Gripper

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

Vacuum Gripper

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

PSxx-OMU0002CN

4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/

Digital Flow Switch (Integrated display type) ( compatible)

Min. to Max. a to b c to d PF3W7 oC Common 0 to 100 -10 to 110 0 to 1000 -100 to 1100 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

3 Port Solenoid Valve

CAT.ES11-82 B 3 Port Solenoid Valve Power consumption 0.1 W (with power saving circuit) Power consumption 0.1 W (with power saving circuit) Power consumption 0.1 W (with power saving circuit) Series V100 Coil temperature rises: 1C (with power saving circuit) Sonic conductance C: 0.037 (Standard)/C: 0.076 (Large flow capacity) Series Flow characteristics C[dm3/(s bar)] b Cv Standard Large

PSxx-OMU0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8,433: *2) 1. 2. 3. 1. 2. 3. 4

Cylinder

Li , I z I With auto switch Bore size 47.5 52.5 57.5 21.5 35.5 40.5 45.5 3 62.5 20 6 30.5 6 10' 45.5 .50.5 \ 55,5 60.5 75. 7 ~.Jo 2 1 _~ 35.5 \ 40.5 55.5 \ 3 26 :60:5 00.5 30.5 45.5 54.5 59.5 64.5 69.5 79.5 9 33.5 15 35.5 40.5 55.5 \ 4 23 ~ . eorEt size ; D ., E NN A X B' F GA GB LH LX A lI' B Mt\1 oLC ~ ~T : H ~ . . . Y .. ".,.. , ",. ,." ,. ,." , .. .' .

PFxx-OMY0005

(Page 77) 8000 0x1F40 0 R 8010 0x1F4A 0 R Flow rate PD conversion equation: b F32 N 8020 0x1F54 0 R Flow peak value S16 N 0x0 to 0x1068 (0 to 4200) 8030 0x1F5E 0 R Flow bottom value S16 N 8060 0x1F7C 0 R Accumulated PD conversion equation: a F32 N Measurement related 8070 0x1F86 0 R Accumulated PD conversion equation: b F32 N Refer to "Inclination and intercept to the unit specification".

CE

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase to 200 5 phase to 30 Sanyo Denki Co., Ltd. 5 phase to 80 5 phase to 100 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5

Mist Separator Regulator

Model Bracket mount Panel mount With barb f itting With drain guide With drain cock With drain guide With drain cock With drain guide Q R U V W Y Z B B B B B B B AWM20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWM30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWM40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9

Ｍ icro Mist Separator Regulator

Model Bracket mount Panel mount With barb f itting With drain guide With drain cock With drain guide With drain cock With drain guide Q R U V W Y Z B B B B B B B AWD20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWD30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWD40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9

Single Axis Electric Actuator Series LJ1

100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase to 200 5 phase to 30 Sanyo Denki Co., Ltd. 5 phase to 80 5 phase to 100 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5

Digital Flow Switch ( compatible)

(page 75) 8000 0x1F40 0 R Inclination of flow rate PD a F32 N Measurement related Refer to "Inclination and intercept".