Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12
type Oval type Round type Oval type Round type 4, 6 8 to 16 4, 6 8 to 16 4, 6 8 to 16 Different Diameter Double Union Y Union Y Different Diameter Union Y KQ2UD KQ2U KQ2U Round type Round type Round type 4 to 8 4 to 16 4 to 16 Branch Y Plug-in Reducer Tube Cap KQ2U-G KQ2R KQ2C Round type Oval type Round type Oval type Round type 4 to 12 4, 6 8 to 12 4, 6 8 to 16 1 Metric Size Stainless Steel
Description Material 25 PDU-10Z PPD-25-19 CM-025-16-124 32 PDU-12LZ PPD-32 CM-032-16-126 40 PDU-16Z PPD-40 CM-040-16-127 50 63 80 PDU-25Z PPD-80 CM-080-16-152 100 PDU-30Z PPD-100 CM-100-16-153 Rod seal Piston seal Tube gasket NBR NBR NBR PDU-20Z PDU-20Z @4 @5 @6 PPD-50 CM-050-16-128 PPD-63 CM-063-16-129 With air cushion (Parts @4 to @6 are the same as rubber bumper style.)
stations) 1 to 8 stations SDVB Serial kit for CC-LINK 1 to 8 stations (16 stations) AS-i, 8 in/out, 31 slave modes, 1 power supply systems 1 to 4 stations (8 stations) (16 stations) Serial kit for PROFIBUS-DP Serial kit for DeviceNet/PROFIBUS-DP/CC-LINK AS-i, 4 in/out, 31 slave modes, 1 power supply systems 1 to 2 stations (4 stations) 2-2-19 Base Mounted Series VQC4000 How to Order Valves
Unit Unit part number Unit ID Configuration data size [byte] SI unit EX600-SEN3-X80 (32 outputs) 9Bh 27 EX600-DX#B (8 inputs) 01h 4 EX600-DX#C (8 inputs) 03h 4 EX600-DX#D (16 inputs) 05h 5 Digital input unit EX600-DX#E (16 inputs) 14h 5 EX600-DX#F (16 inputs) 16h 5 EX600-DX#C1 (8 inputs) 0Dh 5 EX600-DY#B (8 outputs) 08h 9 Digital output unit EX600-DY#E (16 outputs) 18h 15 EX600-DY#F (16 outputs
to 31 CH4: Flow measurement value With symbol 16 bit 32 to 47 CH3: Flow measurement value With symbol 16 bit 48 to 63 CH2: Flow measurement value With symbol 16 bit 64 to 79 CH1: Flow measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Flow measurement value (PD) Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Item CH2: Flow
layout (Up to 16 solenoids possible.) 16 16 stations Nil S R RS Internal pilot specification Internal pilot/Built-in silencer External pilot specification External pilot/Built-in silencer Note 1) Double wiring specification: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations.
:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of
Metric size (Release bushing: White color) s3.2, o4, 06, o8, o10, o12 . lnch size (Belease bushing: Orange color) s1 18 . o5n.2', o31 16', s1 14", o51 16', qglS' . 01 2' I Speed may be accurately controlled even at low speeds. I Able to control and set a constant speed easily. I Retainer prevents accidental loss of needle. I Maximum operating pressure 1 MPa max.
Note 1) (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.
/t08 c/6 3/8 718-14 7ls t.79 .408 5/8 1t2 718-14 7t8 1.98 .501 Tube To Male Pipe: 90' ELBOW 1i8 1ts 3/16 1t8 3/16 'v4 Consult factory for iniormation 114 1t8 114 114 114 3/8 1t4 1t2 vl6 1/8 112-20 .90 .220 5/16 114 1t2-20 qt .vc .220 5/16 318 1t2-20 .98 1 .01 .219 5/16 'v2 Consult iactory lor iniormation 3i/S 1/8 5/8-18 1.01 .220 3/8 1t4 5/8-18 1.01 1.O5 .283 3/8 3lS y8-18 1.O4 1.07 .28'l
Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.
Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.
inch (Maintenance space 100mm or more) IDG10, 20 IDG10H, 20H With fittings for purge air discharge (Option: P) (H) Purge air E A Port size L C 41 2.3 Purge air discharge tubing port for dew point indicator Applicable tube O.D.: 8 5/16 inch 14 7 14 16 23 IN OUT Bracket (Accessory: B) (G) B D Purge air discharge tubing port for dehumidification Applicable tube O.D.: J (NPT thread: K inch)
(Refer to page 14-19-16.) Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.
"-M" ( ) "-M" 13 SI kPaMPa 14 15 () 16 () / ( () ) -29No.PS-OMG0001CN-H OUT1 80mA OUT2 7F.S. 3 ( 4dights ) 1 -30No.PS-OMG0001CN-H PSE3 -100100 kPa 0-101 kPa 0100 kPa 01 MPa 0500 kPa 02 kPa 1 -101101 kPa 10-101 kPa -10100 kPa -0.11 MPa -50500 kPa -0.22 kPa 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa DC1224 V10P-P10 50 mA() PSE30DC15 V(1 M) PSE31DC420mA100 ) 1 26.4V
cock 10 With auto drain With auto drain 01 11 How to Select Max.
-2No.PS-OML0002CN-G 1 1.5 3) 3) 1 1 () [] -3No.PS-OML0002CN-G () () () () -4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A
@numoer ,Inn|i''tral lo'd Double acllng Singte rcd o32 to s4clls lo 1O0 a50 to s1OU10 to 100 Axial piping (c.nri.liEd FiFine) Double acling Single rod o12, o 16/5 to g azo, a25/5 to 50 a32, o4O/5 lo 1N o50 to 01 0C/1 0 to 1 00 Single acting Spdng rctum/er.lend 612lo o4O/5, 10 z5U1O,20 ,.option" 12 to 1m 12 to 10O ,,r,${*i**#{rt$**F_\r;,;tl:r,r. : ..