Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

Regulator Valve

Option Rated voltage Voltage symbol Part no. 100 VAC 100V VK300-82-2-01 110 VAC 110V VK300-82-2-03 200 VAC 200V VK300-82-2-02 Note) When requiring a gauge different than that mentioned above, specify the model number. 220 VAC 220V VK300-82-2-04 Option is packed with it.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

CKZ2N

2 Cover cap screw q Switch actuator Note 2) CKZN-D050 !0 Socket head cap screw o Spring washer r Bumper w Stopper bolt 50 Note 2) CKZN-B050 !1 Seal washer Note 2) CKZN-K050 CKZN-D050 CKZN-B050 !3 Short head cap screw !4 q Switch actuator Note 2) CKZN-D063 !

Moisture Control Tube

(ANR) Nominal filtration rating (m) Port size 0.3 (Filtration efficiency 99.9%) 300 to 12000 AM 1/8 to 2 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

SMC CORPORATION OF JAPAN

Introduction. 1-1 1.1 Outline .1-1 1.1.1 List of Models Compatible with the SMC VLS software . 1-1 1.1.2 Product Configuration. 1-1 1.1.3 Major Features of the ECC-PNAL-PCS/WIN-E Software. 1-1 1.2 Definitions.1-2 1.3 Abbreviations.1-2 2. Installation . 2-1 2.1 Operating System Requirements.2-1 2.2 Installation.2-1 2.3 Uninstallation .2-1 2.4 System Configuration .2-2 3.

Compact Proportional Solenoid Valve Series PVQ

Port size Power supply '$ ( $* ( Coil current ') + Power consumption $ % Coil insulation & '" 0 7 2 9 9 5 5 ' " %2 2 9 9 0 0 ! : 0 7 32 ! 5 0 0 " 2 0 07 2 ; <2 0 2 2 2 0 07 0 0 = ; 3 $" 5 0 0 77 0 77 77 3 0 0" 322 3 7 3 2 2 9 9 7 2 0 77 5 2 5 0 77 7 7 2 9 9 !

MLU

2 No. !5 !6 !7 !8 !

IIIIIIIIII

F-4300-2 F-4300-5 F-4300-15 F-4300-30 F-4300-60 F-4300-100 .2 .5 .5 .5 .5 1 2 5 15 30 60 100 30 30 45 60 120 120 .1 .2 .4 .6 1.5 2.0 .2 .35 .6 1.0 2.5 3.5 3A 4A 4A 4A 4A 4A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4300BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID B85 = NYLON 1/8" ID P80 = POLYSULFONE 1

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Low Profile

Low Profile 2/3-Port Solenoid Valve RoHS Compact Overall length Valve width Actual size Valve height 2-port 3-port 3-port valve 2-port 3-port Overall length 38 mm/54 mm Approx. 10 mm Valve width/ height 2-port 3-port 10 g/20 g Weight 2-port valve Normally closed Large flow rate 2-port/N.C. 3-port 2-port valve Universal C [dm3/(sbar)] 0.25 0.5 Flow rate [L/min (ANR)] 45*1 90*1 *1 At 0.2 MPa

SYJ300-OMU0003

01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V) 220VN SY100-82-2-04 AC DC LED R NL R: 12 No.SYJ300-OMU0003 SYJ Series

Directional Control Driver for Electric Cylinder

Applicable mounting screw: M3 (2 pcs.)

No more element replacement!

Note 2) The FN4 series is equipped with two pressure gauges.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Electro-Pneumatic Positioner

Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.

AR20-B to AR60-B

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 63 for size 10.