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9.5 34.5 47.8 R 4.5 MPa PRESSURE R 4.5 21 OUT SET MADE IN JAPAN 8.75 Panel thickness 0.5 to 6 7 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Dimensions Panel fitting dimension 1-pc. mounting Multiple (2 pcs. or more) horizontal mounting MPa PRESSURE MPa PRESSURE MPa PRESSURE OUT OUT OUT SET SET SET 31 x n pcs. + 3.5 x (n pcs. 1) 0 0.4 31 0 0.4 31 24

When wiring AC supplies the Live cable should be connected to the L terminal and the Neutral cable should be connected to the N terminal. Do NOT connect the Live wire to the N terminal, the user might receive a dangerous shock on powerup.

75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Blanking plate Port (1) A, Port (2) Port (3) n-Rc 1/4, 3/8 Pitch n: Stations n Symbol L1 L2 2 131 111 3 177 157 4 223 203 5 269 249 6 315 295 7 361 341 8 407 387 9 453 433 10 499 479 Formula: L1 = 46n + 39, L2 = 46n + 19 4-7-22

391.5 379.5 382 31.5 144 136 68 23 40 AFF,AM,AMD 80D 1 1/2 404 392 394.5 38 170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

on both sides Brackets on both sides L8 x n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 Note 1) Refer to page 3 for L8.

NPN) Reed switch Solid state switch Z76 5 V IC Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Relay, PLC 100 V, 200 V 2-wire 24 V Diagnostic indication (2-color) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC Grommet 100 V, 200 V 12 V 2-wire 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic indication (2-color) 12 V 2-wire 24 V Water

IN (N) Standard strokes (mm) Model (N) 63 MGTM Piston area (mm2) Operating pressure (MPa) 25, 50, 75, 100, 125, Rod size Bore size Actuation direction 80 (mm) (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 150, 175, 200 MGTL 100 2805 2494 2182 1870 1559 1247 935 OUT 3117 623 3117 63 20 Intermediate strokes 2523 2242 1962 1682 1402 1121 841 IN 2803 561 2803 Intermediate strokes (in 5mm increments

) 10 m or less CN3 10 m or less 24 V DC (Note 10) 3 DOCOM (Note 15) Main circuit power supply CN3 (Note 12) (Note 2) (Note 17) Electromagnetic brake interlock 13 MBR (Note 3, 4) Forced stop 2 RA1 20 EM2 (Note 13) 9 INP In-position RA2 FLS DI1 2 15 ALM Malfunction (Note 11) (Note 14) RLS DI2 12 RA3 DOG DI3 19 5 DICOM Encoder A-phase pulse (differential line driver) 6 LA (Note 10) 24 V DC 16

SGH Ex. 2) 3 port valve: Switching nozzle 12 VNC VNH Port 12(P1) (Pilot air SUP port) Nozzle Port 12(P1) (Pilot air SUP port) 3 1 2 VNH VNH Tank Coolant pump VND Switching nozzles on supplying coolant liquid.

25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40

50 292.5 (294.5) 308 (310) 332 (334) 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 Note) ( ): CE-compliant product (-Q) Flange Type/Port size: 65F, 80F Pg9 Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) Pilot port 12(P1), 10(P2) 1/4 30 D 12 P1 P2 B (Air operated) H (External pilot solenoid

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire 3-wire (NPN) 3-wire (PNP) Relay, PLC IC circuit 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color indication) Y7BA Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Solid state switches marked with are produced upon

Expression of Calculation of Allowable Fp, Fy, Fr Pitch moment Yaw moment Roll moment Fp = Lp x Cp x (St/12) (N) Fy = Lr x Cy (N) Fy = Ly x Cy x (St/12) (N) Lp: Distance between table and loading point (mm) Cp: Correction value of moment center position distance (mm) St: Stroke (mm) Ly: Distance between table and loading point (mm) Cy: Correction value of moment center position distance (

Expression of Calculation of Allowable Fp, Fy, Fr Pitch moment Yaw moment Roll moment Fp = Lp x Cp x (St/12) (N) Fy = Lr x Cy (N) Fy = Ly x Cy x (St/12) (N) Lp: Distance between table and loading point (mm) Cp: Correction value of moment center position distance (mm) St: Stroke (mm) Ly: Distance between table and loading point (mm) Cy: Correction value of moment center position distance (

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 12.9 17.5 29.4 12 29.6 33.8 28.8 34.6 9.6 10 7.8 11.7 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 13.7 20.6 32.5 13 34.6 6 ASD330FM-01-06S 39.6 14 11.6 13.7 29 22.9 38.5 35.2 30.2 14.2 11.8 10.6 R 1/8 12 32.1 27.1 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 18.5 31 28.2 44.8 6 ASD430FM-02-06S 12.8 17 53 25.2 43.5 18 8 ASD430FM-02-08S

30.7 Brackets on both sides Brackets on both sides L8 x n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 1 Refer to page 618 for L8. 2 The above figure shows the manifold with controllers connected using two L-brackets and a threaded stud kit for manifold.

. 12-1. 2 12-2. 1) 1) 2 3) 1ISOVG32 8 4 0.7 12-3. 1 12-4. 1) 1.52 13. 1 2 1 1060 14. 12 9 15.