SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Compatible motor Actuator part number P Step motor (Servo/24 VDC) (Except cable specifications and actuator options) Example: Enter LEMB25T-300 for the LEMB25T-300W-S12N1.

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Air Cylinder/Low Friction Series CS1lQ Non-lube/125, 140, 160 How to Order Standard L Q 160 300 JR CS1 160 A53 L Q 300 JR CDS1 With auto switch Number of auto switches 2 1 3 n S 3 n With auto switch Mounting Basic Foot Front flange Rear flange Single clevis Double clevis Center clevis B L F G C D T Auto switch Low friction Without auto switch * Select the applicable auto switch from the

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

Large Type Vacuum Unit Series ZR

AC type Electrical entry DC: 0.45W type (with light: 0.5W) Y Nil Air operated For 24, 12, 6, 5, 3 VDC L Lead wire length 0.3m LN Without lead wire Solenoid valve rated voltage Plug connector type LO Without connector Nil Air operated M Lead wire length 0.3m 5 24VDC MN Without lead wire 6 12VDC MO Without connector V 6VDC G Lead wire length 0.3m Grommet type S 5VDC H Lead wire length 0.6m R

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -15, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -15, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -15, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -40, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -40, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryer Units, Method: Hollow Fiber Type, Shape: Unit, Unit Combination: [Oil Mist Filter + Micro Oil Mist Filter + Dryer] Mist Separator+Micro Mist Separator+Membrane Air Dryer, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(