MXS Series Air Slide Table

4 M 71 71 71 83 103 149 203 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 Note) Refer to "Dimensions" of MXS 12 on P. 58 for one with shock absorber as symmetric.

SV

With External Pilot Specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

NCA1

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

NCA1

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

High Vacuum Angle Valve, XL Series

valve conductance l /s (viscous flow) XLD-50 10 XLD-40 XLD-25 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 6.5 7 Adjustment nut rotations n Initial exhaust valve conductance setting Options The magnet (21) actuates the auto switch (4) indicating the position of the integrated valve M (13) and the piston M (8).

Series AP3100

4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m) Face seal , Tube weld Bottom mount 0.36 in3 (6.0 cm3) 1.27 kg 5) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight 1/4 turn round knob with open/close indication window 7) 1/4 turn lever knob 6) Pull twist knob 8) Multi turn round knob (1 1/2 turn) Knob Option (Part number: AP PL227

Compressed Air Preparation Filter

MPa 0.1 Nominal filtration rating*1 m 1 (99% filtered particle size) Water droplet removal ratio*2 % 99 Compressed air purity class*3 ISO 8573-1:2010 [ 4 : 7 : 4 ]*4 Max. flow capacity*5 L/min (ANR) 300 750 1500 2200 3700 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4, 1 1 Weight kg 0.19 0.39 0.79 1.23 1.46 Bowl material Polycarbonate Stainless steel Bowl guard Semi-standard (Steel) Standard

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

override 7 21.8 (Mounting holes for manifold) G : About 300 H : About 600 23.2 equivalent (Mounting holes) Bracket (Lead wire length) 18.5 (Non-locking) Manual override 28 [34.5] 15.6 18.5 20 13.5 9 46.5 35.5 40.4(GZ:41.1) [42.1] 91.7(GZ:93.1) [95.1] R R P 11 0.5 10 5-M3 0.5 (Piping port) 7 7 [ ] for AC 3 4 5 3 4 5 L type plug connector (L) : SYJ3 20L -M3 M type plug connector (M) : SYJ3

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.

o

inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

o

inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

Low Profile Guide Type

(mm/s) : Distance to the load's center of gravity (m) : Dynamic moment (Nm) : Gravitational acceleration (9.8 m/s2) m FE ME L1 1.4 100 1 3 Note 4) a is a dimensionless coefficient for calculating impact force.

MGG

Black coating For non-locking type For locking type 20 21 22 23 Oxide film treatment For non-locking type Black Coating Black zinc chromated, Red coating Zinc chromated For locking type 24 For locking type M/O bolt For locking type M/O spring 25 24 Series MGG Dimensions Basic type/MGGB 20 to 50 4-F through, counter bore G Bottom 4-H M N HR HN (max.) Bracket (See table below.)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

Series IDG

indicator Applicable tube O.D.: 8 (196) Dew point indicator (Option: PS) (73) 45 11 IN OUT (177) 120.5 (64) Port size: Rc 1/8, 1/4 (NPT, PF threads not available) Drain Drain Purge air discharge tubing port for dehumidification Applicable tube O.D.: 8 M5 x 0.8 24 Series IDG Membrane Air Dryer Dimensions (mm) (M Type) 1in = 25.4mm IDG10M, 20M G 0 , 0 IDG10HM, 20HM Port size 1/4, 3/8 71 A