SYJ3000/5000/7000

Load factor: ( (Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke + G mm) T Z LEF V EV J H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

Table of Contents

Regulator block stations 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations IN OUT OUT IN 5 stations 6 stations 4.

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)

MY1

) (N) a: Average speed (mm/s) M: Static moment (Nm) = 1.4a (mm/s) FE = 1.4amg MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 5 5 5 4 4 4 MY1H20 MY1H20 MY1H20 MY1H20 MY1H20 MY1H20 MY1H20 3 3 3 m FE Note 4) L1 MY1H16 MY1H16 MY1H16 MY1H16 MY1H16 MY1H16 MY1H16 ME 2 2 2 Note 5) 1 3 MY1H10 MY1H10 ME = FEL1 = 4.57amL1 (Nm) MY1H10 MY1H10 MY1H10 MY1H10 MY1H10 Note 4) 1.4a is a dimensionless coefficient

Compact 5-Port Solenoid Valve

2(B) port side: Yellow (DIN rail) (8) 9.5 A A A A B B B B 78.5 66.5 66.2 4 A 4 A 4 A 4 A 47.3 B 2 B 2 B 2 B 2 (5.5) (35) 4.6 (26.1) 5.3 2.2 (12.2) (14.8) 18.6 4 x M4 Mounting hole (Recommended tightening torque: 1.4 N.m) 18 L2 44.8 1.5 18 0.6 m, 1.5 m, 3 m (Lead wire length) (L4) (DIN rail mounting hole pitch: 12.5) (5.3) (Fitting for the type with P/E ports on the U and/or D sides) (L3)

ZP

Suffix of how to order (@) U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 4 to 8 Model Pad unit part no. Buffer assembly part no.

Modular F.R.L. Unit

L 4.5 M 2.8 P 26 T 0 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 85 26 35 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 141 5.5 3.2 65 2 Note 1) 123 36 60 126 55 57 41 35 0 14 7 7 4 71 64 28.5 194 153 38 80 167 55 57 41 35 3.5 194 14 7 7 4 71 66 30.5 153 38 80 167 72.5 75 50 40 3.5 226 18 9 88 35 9 4 74 187 40 110 220 77.5 80 50

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

/ Pressure Sensors (5.25) (L3) (L4) D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting Flat ribbon cable connector assembly (20P) AXT100-FC20-1: 1.5 m AXT100-FC20-2: 3 m AXT100-FC20-3: 5 m EXH R EXH R DIN rail clamp screw B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

/ Pressure Sensors (5.25) (L3) (L4) D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting Flat ribbon cable connector assembly (20P) AXT100-FC20-1: 1.5 m AXT100-FC20-2: 3 m AXT100-FC20-3: 5 m EXH R EXH R DIN rail clamp screw B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting

0.4

P. 410 3 2 1 4 3 2 1 4 4 3 2 1 Note 2) S0 Without SI unit Max.16 stations SQ SR1 SR2 SV SZB SZBN DeviceNet Max.16 stations OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-LINK CompoNet (Positive common) CompoNet (Negative common) P. 402 Max. 8 stations L0 L1 L2 With cable (0.6 m) With cable (1.5 m) With cable (3 m) P. 398 Max. 16 stations 1 to 8 stations T0 Terminal

CV/MVGQ

Same side 90 + 50 (n 4) 2 (n 2) 2 15 + 50 n = 2, 4, 6, 8 (n 4) 2 110 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 n = 4, 8, 12, 16 n = 4, 8, 12, 16 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8, Different sides MQQ M n Same side RHC 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides MK(2) 2 Same side (n 2

CV/MVGQ

Same side 90 + 50 (n 4) 2 (n 2) 2 15 + 50 n = 2, 4, 6, 8 (n 4) 2 110 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 n = 4, 8, 12, 16 n = 4, 8, 12, 16 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8, Different sides MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

KJ

8 1 4 1 8 1 4 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 2.5 19 41 19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 11.11 14.29 11.11 14.29 11.11 14.29 11.11 14.29 17.46 12.7 14.29 17.46 9.6 10 17.5 15.5 1 8 43 37.5 43.5 38 44 40.5 46.5 48.5 43.5 49.5 51.5 56 58 64.5 58 60 66.5 10.4 10 16 3 18 5 32 11.4 10 16.5 3.5 19.5 3 16 K 1 4 4.6 17 13.2 10 20.5 M H 5 16 6 18.5 15.2 12

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

VQZ1000/2000/3000

3 position pressure center 2.4 3.2 L plug connector (L) (A) 4 (B) 2 1 (P) 3 (R2) 5 (R1) M plug connector (M) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector (M) 0.54 0.71 (A) 4 Locking type (Tool required) DIN terminal (YZ) DIN terminal (Y) 1 (P) 5 (R) Except VQZ1000 ) ( VQZ2000 N.C. 1.4 1.6 (B) 2 1 (P) 3 (R) Except VQZ1000) ( N.O.

One-touch Fittings

type 8 to 16 4, 6 M M L Release button dimensions X X *1: D is maximum diameter.

Modular F.R.L. Units

Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC20C-B 1/8, 1/4 1/8 126.4 87.6 26.5 41.6 40 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25C-B 1/4, 3/8 1/8 167.4 115.1 28 30 55.1 50 27.5 0 41 57.2 35 7 14 4 41 AC30C-B 1/4, 3/8 1/8 167.4 115.1 30.7 30 55.1 50 29.4 3.5 41 57.2 35 7 14 4 41 AC40C-B 1/4, 3/8