EX260-SPN-A_eng

Valve manifold Accessories Side D NOTE (SI unit side) Replacement of the SI unit Remove the M3 hexagon screws from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

EXxx-OMV0018_ENG

Otherwise malfunction can result, causing an accident. : Thread size: M3 x 30 Node ID setting No.1 Reserved Technical documentation giving detailed specification information can be found on the SMC website (URL http://www.smcworld.com). The following instructions must be followed during maintenance: Turn off the power supply.

EX500-Sx03_eng

Check that the M3 hexagon socket head cap screws have been tightened to the specified torque. If these items are not adhered to, it may lead to damage to the unit or intrusion of liquid or dust into the units.

IZN10_C

M3 0.610.63Nm 1) 12mm 10mm -10- 2)L L 4 -11- L (M3X6)L :0.610.63Nm M3 -12- L L M3 (M3X6) :0.610.63Nm 3) :0.610.63Nm 90 -13- 4)DIN L :0.610.63Nm (M3X6)L :0.610.63Nm DIN :0.610.63Nm -14- 5) :0.610.63Nm 3 M3 L DIN -15- 4 4 4 4-3. 3. 3. 3. 1 +24V 2 GND 3 OFF 4 ONOFF OFF 5 0N 6 OFF 7 ON 8 1 ON 9 2 ON ()D ON NPN:GND ONOFF PNP:24V ONOFF NPN:(GND )ONOFF

Parallel Type Air Gripper

Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Model Applicable bolts Max. tightening torque (Nm) MHY2-10D MHY2-16D MHY2-20D MHY2-25D Model Bore(mm) Hole depth (mm) Attachment MHY2-10D MHY2-16D MHY2-20D MHY2-25D 11H9 17H9 21H9 26H9 1.5 1.5 1.5 1.5 +0.043 0 +0.043 0 +0.052 0 +0.052 0 0.88 2.1 4.3 7.4 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 (1) To mount the attachment to the finger, make sure to use a wrench

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Without auto switch With auto switch C H OA Bore (mm) Standard stroke (mm) A 29 29 35 39 I K L D N M OB Q RA RB T E Inch Inch 5.4 5.4 7 10 Inch #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC A 34 34 45 49 B 22 22 26 29 B 27 27 36 39 Metric 6 8 7 12 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

IDX-OM-M051

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote operation] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

IDX-OM-W017

IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm

IDX-OM-W053

L N PE M3 6.5mm 1.25mm 2 :17 1 2 2 2 , 2 1 IDFA6E 20kg 2 2 2 2 2 1 240 050 ( ) 2000m 600mm 600mm 600mm 600mm 600mm 2 1 2 2 2 2 6 6-2 2 2 3 50 50 2 2 4 10mm ( 2 2 2 2 2 5 6-1 IEC AC200V 30mA 5A 1.25 216AWG,3 ,812 0.1m 30m M3 1.25-3 6.5mm () M3 0.61Nm 2 3 2 2 3 () 2 2 () 2 4 3 / 3 3 1 INOUT 3 2 ON () INOUT 5 ONOFF 0.15MPa NO IN 3 1 3 / 3 3 OFF OFF

IDX-OM-U022

M3 6.5mm 1.25mm 2 M3 6.5mm 1.25mm 2 IDFA100F150F 1 6 1.3 IDX-OM-U022 2. 2.1 45 45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

PSxx-OMR0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

PSxx-OMT0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

EX260-SMJ_eng

M3 hexagon screw Tightening torque 0.6 Nm Terminating resistor Valve manifold : Thread size: M3 x 30 Troubleshooting The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

F/ISE

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98Nm or less.

VDW

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 48 5 11 56 VXA 1 6 VN 1 8 5 M5 M5 LVC 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 1 (IN) port 2 (OUT) port LVA 15 LVH 2-M2.5 x 0.45 2-M3 x 0.5 thread depth 5 LVD Thread depth 3.5 VDW31 LVQ 36 (27.6) LQ 300 Lead wire LVN 40 30 SMC SMC 1 1 TI/ TIL AC

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

This dimension shows Q3 (M3 x 0.5).