Table Accuracy: Basic, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length

Table Accuracy: High Precision, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length for

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length

Table Accuracy: High Precision, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length for

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: Pulse input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: Pulse input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: CC-Link direct input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: CC-Link direct input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: SSCNET III type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: SSCNET III type

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator cable length(m): 5, Controller

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.32, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator cable length(m): 5, Controller

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator

HRX-OM-Z002

Ensure there is enough space for maintenance. 500 mm or more 300 mm or more 300 mm or 800 mm or more 800 mm or more more Fig. 3-5 Installation space HRLE Series 3.2Installation 3-7 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3 Installation Procedure 3.3.1 Installation procedure Install the product on a level, vibration-free floor.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig