LFE-OMY0008

([n1L]) [P1H] or [n1H] ([n1H]) (33 ) 30 No.LFE*-OMY0008 c. ()/() ( [n1AH]) ( [n1dH]) () 31 No.LFE*-OMY0008 ( ) 3 6 3 1 3 6 6 1 1 1 32 No.LFE*-OMY0008 4. 4. 4. 4. (OUT1)( ON ON ON ON OFF OFF OFF OFF ON ON ON ON OFF OFF OFF OFF 5. 5. 5. 5.

XSA Series

pressure Pa(abs) 110-6 Leakage Pam3/s Internal 1.310-9 Note4) External 1.310-11 Piping method Face seal fitting and compression fitting / (Rc, NPT) Threaded ports Port size Inch Face seal fitting Compression fitting 1/4 3/8 1/4 3/8 Rc, NPT 1/8 1/4 3/8 Rated voltage Note 5) 100/110/200/220/230/240/24/48VAC 12/24VDC Ambient and fluid temperature oC 5to60 Power consumption [W] Note 6) DC polar

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled. Contact SMC when replacing component parts.

Pneumatic Transfer System Series MF

bore, depth 5.5 From back 2 x 2-M6 x 1.0, thread depth 12 4 2-M8 x 1.0 Adjustment bolt 36 60 6 15 66 15 66 32 69 68 52 1 0 10 6 (absorber stroke) 36 2-RB0806 shock absorber M8 x 1.0 0.5 (difference in level) 93 Note) Rc(PT) 1/8 Cylinder port 174 + Stroke 6 6 2-7 through 52 82 15 28.5 M5 x 0.8 Hexagon socket head plug 25 36 8 48.5 48 59 60 52 44 40 SMC 11 (width across flats) 11.5 Body (Support

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10 Process Pump Automatically Operated Type with

Stainless Steel Heat

3/4 560 530 470 540 325 260 85 130 Rc 3/4 297 315 330 440 IDFS11E 605 575 325 355 540 285 110 130 315 Rc 3/4 325 485 515 Note: The diagram above is drawn base on IDFS6E dimension with scale 1:6 6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.

Multistage Ejector Series ZL112/212 1

For EE (ZSE4E) 24 V 12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

A

When screwing fittings into valves, tighten with the torques given below. 1 2 Tightening torque for piping Terminal 1 2 Proper tightening torque Nm Connection threads DIN terminal + Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Lubrication Rc 1 36 to 38 Caution 4.

212

12 19 Inch Integral fittings 1/4" 1/2" 3/4" Tubing size Tube extensions Metric 6 6 Inch 1/4" 3/8" 1 Regulator for Chemical Liquids Series LVR How to Order 07 LVR 2 Z 0 Integral ttings Body class Pilot port thread type Symbol Type Nil Rc N NPT Symbol Body class 2 2 4 4 5 5 Applicable tubing size Fitting type LQ1 Metric size Inch size Symbol Model V LQ1 Z LQ3 Symbol Applicable tubing size

Plate Cylinder

Range (mm) Number of auto switches mounted Same surface Different surfaces Bore size 40 6 50 6 63 6 15 1 15 2 Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed.

PFA/PFW

unit DIN rail 8-M3 3 x 7.2 ( = 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 m30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43

MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 12 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Air Combination

In this case, consume air at the outlet which will bring the pressure closer to the set pressure. (6) Outlet pressure may change if the product is used for a long period of time.

155

4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 6 4 6 4 6 6 8 8 21.1 25.4 23.7 33.6 31.8 40.1 38

Soft Start-up Valve AV2000/3000/4000/5000 1

ITV IC 1 2 Proper tightening torque (Nm) Tightening Torque when Piping VBA Connection threads Rc 1/4 12 to 14 VE Rc 3/8 22 to 24 Terminal 1 2 Rc 1/2 28 to 30 DIN terminal + VY1 Rc 3/4 28 to 30 Rc 1 36 to 38 G Lubrication 4. Piping to products When piping to products, avoid making an error of supply port, etc., by referring to the instruction manuals. 5.

Hand Valve Series VH

(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3

AC Servo Motor Driver (Pulse input type/Positioning type ）

PF_ _ ]) . 5-63 6. NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

Refrigerated Air Dryer

(sensitivity current 30 mA) (A) 15 IDG Condenser Forced air-cooled IDK Refrigerant R134a (HFC) Symbol N NPT 3/8 (female) Rc 3/8 (female) With Rc conversion adapter NPT 1/2 (female) NPT 3/4 (female) NPT 1 (female) AMG Rc 1/2 (female) With Rc conversion adapter Rc 3/4 (female) With Rc conversion adapter Rc 1 (female) With Rc conversion adapter Thread symbol and size Symbol Nil AFF Symbol N

Escapements Series MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.