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Up to 64 Function Blocks or 1500B of memory may be programmed into the PneuAlpha. Additional EEPROM memory cassettes can be used to store and run alternate programs. page 6 Operations Function Block Programming: So Powerful Yet So Easy...

SMC CORPORATION OF JAPAN

Up to 64 Function Blocks can be used in a program or 1500 bytes of memory. The Function Blocks must be added in the course of programming. The eight Keys and the ve system M bits are automatically available for every program.

Model Selection 1

Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L M N W H E W 12 19 10 12 6 8 10 4 6 LQ2U22 LQ2U21 19 18 19.9 16 55 1/4 (M) LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 22 24 26.2 24 H 77 64 (E) (E) L 28 30 33.1 30 21 Class 2, 3 88 75 32 36 40 36 26 86 (M) N Inch sizes Applicable tubing O.D.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

VDW

N.C. (2) N.O. (3) AZ-T-VDW Valve model no. on page 17-2-64/68/74 LVA (1) IN 3 Port Valve LVH Clip part no. (2 port) Max. operating pressure differential (MPa) Series VDW 2 0 10 2 Orifice size (mm ) LVD Model Pressure port 1 Pressure port 2, 3 (1) LVQ 0.9 1 0.3 2 3 10, 20 30 VDW200 0.7 1.6 0.1 LQ 0.8 2 0.2 Socket assembly part no. (3 port) VDW300 0.4 3 0.1 LVN 0.2 4 0.05 Series VDW 2 0 12A

VVX31/32/33

W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

VXD21/22/23

64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

VXR21/22/23

50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

600 13.5 4-Rc(PT)1/8 (P, R port) (Pitch) VZ L2 4.5 L1 VF Built-in speed controller VFR (Non-locking) Manual override VP7 54 [60.5] VP4 41.6 5.5 47.5 A A 35 24 18 B B MAX: 13.5 13.7 2n-One-touch fitting (A, B port) 6 VQ (Pitch) P=16 (Lead wire length) Applicable tube: T0425 300 VQ4 VQZ [ ] for AC VQD L plug connector (L) M plug connector (M) VZS VFS VS 107 0.6 65.1 [71.6] VS7 47.5 0.6 72 64

VHK

14.5 27 22 16.5 26 VHKl-02S-08F VHKl-02S-10F 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 VHKl-03S-08F VHKl-03S-10F 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64

VM

Body Body e Acrylic Piston Indicator window e Polyacetal Plug Piston A r Polyacetal Spring r Polyethelene Spring t Stainless steel NBR Packing t Stainless steel NBR O ring Dimensions Dimensions Panel mounted hole 3.5-64

VQ5000

(3.6Cv) 33 (1.8Cv) 28 (1.6Cv) PB 36 (2.0Cv) 75 (4.2Cv) 78 (4.3Cv) AEA Exhaust side effective area (mm) when P2 = 0.5MPa (72.5psi) 68 (3.8Cv) 38 (2.1Cv) 69 (3.8Cv) BEB Dimensions (mm) 1in=25.4mm SMC 64 181 2 B SMC D 68.5 P 1 X 12 3 R2 5 R1 PE T A 4 41 103 282 40 Base Mounted Type Series VQ5000 Flow Characteristics Conditions Upstream pressure: 0.7MPa ARBQ5000-00-A (PA) ARBQ5000-00-B (PB)

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

51 3(R) 1(P) 3(R) 1(P) VZ 9 16 32 17 4 VF VFR 10 4 10 P=11 L2 VP7 36.5 41.5 L1 VP4 45 M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

External pilot port 11 11 67 VQZ L plug connector (L) DIN connector (Y) VQD 148 (3 Position)<150> 135 (Double)<137> 300 155.5 (3 Position) MAX.10 (Lead wire length) VZS 142.5 (Double) 97.5 (Single)<98.5> Indicator light Pg.7 101.5 (Single) 65.5<66.5> VFS 69.5 Applicable cord O.D. 3.5 to 7 Indicator light VS 64<67.5> Cover diameter 1.5 R1 R2 5 3 1 P VS7 Cross section 0.23mm2 93.5 86 < >

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

62 11.5 R P 29.5 34 3 1 PE port 2-Rc(PT)3/8 P(SUP) port M5 X 0.8 External pilot port (Only external pilot style (R)) 21 18 44.5 2-Rc(PT)1/4 The broken line indicates DIN rail mounted style [-D]. 11 50 R(EXH)port DIN terminal (Y) L plug connector (L) 92(93) 300 (Lead wire) 88.5(89.5) Indicator light 96 MAX.10 64(67.5) 92.5 Cover dia 1.5 Cross section 0.23mm2 Pg.7 R P Applicable cord O.D.

VXA21/22

VQ Refer to p.4.1-64, 4.1-65 for specifications and models.

NVEPA|VEFseies

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Direct Solenoid

64 ,r = a60/aov6oHz 51= 12 \hi Dc' 52 = 2a \bft oc' 'Nol avairable:C ass 4 5 LensesaGsealsd by a spcialo rin! aid.re and dusl liohl 6uibs * *.rr wn burbs red ihrollh a bui\ 'n m,00o,000 cydes Ac rishls may be used on e'lher 50 or 60 cycle seR'ce spec'a cFoss.sEcTtoN.FrJLL sl?E CLASS3 OOUBLE LIGHT ASSY oPTtot{8 0P, KP, OP DIN COI{NECTOR OINCAP PART I NLl Th. DIN connetorgdid.!