Precision Regulator

0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

CG5-S

BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 85 125 40 to 800

CJ5-S

CY Stroke length tolerance Up to 1000 mm, Up to 1500 mm 80, 100 Basic style, Axial foot style, Rod side flange style, Head side flange style, Clevis integrated style MQQ M JIS Symbol Double acting, Single rod Mounting RHC Standard Stroke MK(2) Standard stroke Long stroke Note) Bore size (mm) RS Q G 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

CP95

800 Intermediate strokes are available.

Slider Type/Ball Bushing Bearing

25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm increments up to the maximum strokes.

AME

Inlet pressure (MPa) 14-20-38 3 Super Mist Separator Series AME Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note: Refer to page 14-20-59 for How to Order Bowl Assembly. No.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock: Gray One-touch fitting N.C. auto-drain not available for AMG650.

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2. Discharge the drainage on a regular basis.

CJ1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Single acting 6-2-4 5, 10, 15, 20 MB MB1 How to Order/Double Acting CA2 CJ1B 4 5 U4 CS1 C76 Applicable tubing Mounting style C85 Tubing material Size O.D. 4 mm 4 mm Basic style B Symbol Bore size 2.5 mm 2.5 mm Polyurethane Soft nylon Bore size 4 C95

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Enclosure: IP65

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector:

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 150mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental, Pulse

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 150mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: L (Foot), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental

Accuracy: Basic Type, Size: 32, Motor Mounting: D (In-line Type), Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental, Pulse Input

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: w/Connector

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 150mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA2-S, 200~230V Incremental, Pulse Input,

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 150mm, Motor Option: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Foot, Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA2-S, 200~230V Incremental, Pulse Input, I

Accuracy: Basic Type, Size: 32, Motor Mounting: In-line Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector

IZx-OMX0087

800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.