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Services 15 Sebaai Street, Miami 21411 Alexandria, Egypt TEL: 3-548-50-34 FAX: 3-548-50-34 PAKISTAN (Distributor) Jubilee Corporation First Floor Mercantile Centre, Newton Road Near Boulton Market P.O.

Exhaust Exhaust Supply valve signal ON OFF ON OFF Energy saving control Existing product Exhaust Vacuum Vacuum 1 2 34 56 Air is supplied and exhausted intermittently when the vacuum decreases. Air is supplied and exhausted continuously during the adsorption of the workpiece.

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Dimensions Lateral mounting/CUJB (mm) GA GC GB Without magnet Bore size (mm) P1 F 12 16 20 GA 27 29 34 Z S (Relief port: 10See above) (Vacuum port: 11See above) 2 x P 11.5 13.5 15.5 23.5 25.5 29.5 15.5 17.5 18.5 (Port size) (mm) Built-in magnet Bore size (mm) F 12 16 20 GA 31 33.5 38 Z S 15.5 18 19.5 27.5 30 33.5 15.5 18 18.5 S + Stroke F + Stroke Z + Stroke (mm) Bore size (mm) GA P P1 GC

Services 15 Sebaai Street, Miami 21411 Alexandria, Egypt TEL: 3-548-50-34 FAX: 3-548-50-34 PAKISTAN (Distributor) Jubilee Corporation First Floor Mercantile Centre, Newton Road Near Boulton Market P.O.

.) : VX314/VX324/VX334 Conduit: C Grommet: G 280 D F J D 300 J F G1/2 25 25 Width across flats H Width across flats H K K C C Port size 3 x P Port size 3 x P E E B1 A A B2 B2 B1 Conduit terminal: T DIN terminal: D F J D Cable 6 to 12 F M J 34 G1/2 D 25 Width across flats H Width across flats H N 44 K K C C M Port size 3 x P Port size 3 x P E E A A B2 B2 B1 B1 G1/2 With bracket T 4 Q (mm

M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E F 13 G 3.3 H 9.1 Y 4 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21 8.5 B20 20 ZP20B 22 4 15 19 23.5 12.4 25 10.5 B25 25 ZP25B 27 4 15 19.5 24 15.6 28 10.5 B32 32 ZP32B 34

40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) (40) 50 34

Refer to pages 33 and 34. 4. Membrane module replacement period Replace the membrane module when the color of the dew point indicator turns white or pink. As a guideline, unit should be replaced after approximately 10 years of use (10 hours/day operation).

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 I-G02SUS Y-G02SUS 20 20 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

LVM205R Universal 3 Features 3 Series LVM Power consumption (C) (W) Flow characteristics Fluid temperature Volume of valve chamber Weight (g) Page Water Av Cv Air C b P.1 to 3 0.43 x 106 0.018 0.06 0.2 18 20 2 2.5 at inrush P.4 to 8 0.04 0.13 0.22 11 30 0.96 x 106 1 at holding 0.03 0.1 0.2 20 34 0.72 x 106 1.5 P.4 to 10 0 to 50 (with no condensation) 0.72 x 106 0.03 0.1 0.2 20 34 1.5 5.5

58.5 18 13.6 2.7 depth 10 19 6 60.5 22 63.6 (Max. 68.6) 112 54 74.2 34 62.5 18 13.6 2.7 depth 10 19 7 78.0 30 75.25 (Max. 81) 142 71 94.5 44 79.0 28 16.8 2.7 depth 10 28 8 Series PF3W Dimensions PF3W704S/720S/740S-;-;T Integrated display: With temperature sensor and flow adjustment valve PF3W504S/520S/540S-;-;T Remote sensor unit: With temperature sensor and flow adjustment valve A A D D

F DIN terminal: D Conduit terminal: T J I Cable 6 to 12 J 19.5 H 32 19.5 (7.5) (1.6) (5.5) (A) 25 (7.5) (1.6) (5.5) 44 31.5 G 1/2 G H E OUT IN G (A) E OUT IN Bracket (67) (56) 50 C B (28) F 40 G 1/2 Bracket B C (28) 50 (56) (67) 40 F I 2 x Rc 1/4, 3/8, 1/2 2 x Rc 1/4, 3/8, 1/2 VXD2130-04 2-M5 x 8 18 (mm) Grommet Electrical entry (DC, AC/Class H coil) Model Port size P A B C D E F G H 32 34

MY50-16A-Stroke 14 Seal belt 1 MY50-16B-Stroke MY63-16B-Stroke MY80-16B-Stroke MY100-16B-Stroke Dust seal band 15 1 MYB50-15CA7165B MYB63-15CA7166B MYB80-15CK2470B MY100-15CK2471B Side scraper 27 2 14, 15, 27 and 34 are not included in the seal kit. Order them as required with by individual part numbers.

21.5 16.5 19.5 29.5 24.5 100 W W W (12) (12) 32 19 14.5 17 26.5 22 125 (12) (12) 29 17 13 15.5 24 20 150 (12) (12) 35 20.5 15.5 18.5 29 24 25 (12) 24 14 10.5 12.5 10.5 20 16 50 19 11 8 9.5 11 8.5 15.5 12.5 75 3 16.5 9 7 8 9 7 13 10.5 100 14.5 8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34

mm2 (AWG26) Model M5 01 N01 Port size M5 x 0.8 R1/8 NPT1/8 Insulator O.D. 1.0 mm Color Brown, Blue, Black, White, Gray (5-core) Sheath Finished O.D. 3.5 Sensor pressure receiving area Silicon Piping port (Common) PBT, CB156, Heat-resistant PPS, O-ring: HNBR Piping port C3604 (Electroless nickel plating), Stainless steel 304, NBR Materials of parts in contact with fluid Weight Body 24 g 34

(SW2-2) 1 2 For the test operation select switchSW2-1, please refer to section 4 of LECSS Operation Manual (Simplified edition). -34- 6.6.1 Positioning Mode In order to prevent accidental impact at the end of the stroke, operate the actuator at a low speed initially.

The recommended the parameter for each actuator . 34 6.1 The recommended value of the parameter [LEF] . 34 6.2 The recommended value of the parameter [LEJ] . 35 6.3 The recommended value of the parameter [LEY] . 36 7.

Refer to section 7.5 Parallel I/O signal cable (P.34) for correspondence of terminal numbers and I/O signals. B1 A1 Item Part No.

Measurement mode. *1: Setting of functions Every time the button is pressed, the function steps in the order of "Order of function of setting" on page 34. Set by using the or buttons. For details of how to set each function, refer to the relevant setting of function section in this manual. 33 - NO.