Model: Side Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Lateral, Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P,E Port Location: Both Sides, A,B Port Size: 1/8, Thread: -, Mounting: -

Model: Side Ported, External Pilot, SI Unit Common Specs: Negative Common, Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P, E Port Location: Both Sides, A,B Port - Thread Piping: 1/8, Thread: -, Mounting: -

Model: Side Ported, SI Unit Common Specs: Negative Common, Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P, E Port Location: Both Sides, A,B Port - Thread Piping: 1/8, Thread: -, Mounting: -

Model: 50R (Side Ported, External Pilot), SI Unit Common Specs: N (Negative Common), Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), A,B Port - Thread Piping: 01 (1/8)

Model: 50 (Side Ported), SI Unit Common Specs: N (Negative Common), Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), A,B Port - Thread Piping: 01 (1/8)

LEF-OM006xx

LEFS 25 B 6N 1 20 0 1 DIN 1 6 16 25 25 I/O 32 32 40 40 1.5 m 1 1 3m 3 3m 3 5m 5 5 5m 40 16 25 32 40 16 25 32 ( ( DC24V NPN NPN A A LECP6/LECA6 6N 6N PNP PNP DC24V 6P 6P NPN NPN LECP1 1N * 1N * LECP1 PNP PNP 40 32 25 16 1P * 1P * 40 32 25 16 NPN NPN A A 10 mm 12 mm 16 mm 20mm AN * LECA6 AN * LECA6 PNP PNP B B 5 mm 6 mm 8 mm 10mm AP * AP * 100 mm 100 8m 8m 100 8 8 10m

Air-hydro Unit

28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and

CC

40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of mounting on the wall

XL-OMY0002

8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD-63 AC90240V XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400

XL-OMY0001

/40 200/50 / AC200V 800/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150

Electromagnetic Digital Flow Switch

Note Panel mount adapter ZS-26-B With waterproof seal, mounting screw Front protective cover + Panel mount adapter ZS-26-C With waterproof seal, mounting screw Front protective cover only ZS-26-01 Separately order panel mount adapter, etc. Power supply/output connection lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-C-5 1 pc.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Modular Type Lubricator Series AL

50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

VXR21/22/23

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum

VQ5000

Replacement of pilot valve assembly (Voltage) See pages 40 and 41 for pilot valve assembly part numbers. See page 55 for the replacement method. Nil B Side ported Bottom ported Enclosure Note 2) See page 35 for thread standards.

VQ7-6/7-8

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 40 Series VQ7-6/7-8 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Replacement of pilot valve assembly (Voltage) See pages 40 and 41 for pilot valve assembly part numbers. See page 55 for the replacement method. Nil B Side ported Bottom ported Enclosure Note 2) See page 35 for thread standards.

ZMA

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

Compact and

Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum pressure Vacuum pressure Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] 50 80 80 40 40 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Vacuum pressure [kPa] Vacuum pressure [kPa] 60 Vacuum pressure Vacuum pressure 40 60 60 30 30 Air consumption