SFOD-OMT0012

Start-up . 6 3.1 Preparation . 6 (1) Software installation . 6 (2) Installation and wiring . 6 3.2. Start-up . 6 (1) Supply of power . 6 (2) Start-up of the Controller setting software . 6 (3) Alarm check . 8 4.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.6 2.3 0.4 D-H7BAL D-H7NF D-C73C 0.6 + 2(n 2 2 ) (n = 2, 4, 6) C-C80C 0.6 3.1 3.1 + 2(n 2) 0.4 D-H7C 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-H7LF 0.8 2.8 2.8 + 2(n 2) 0.4 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-B5 0.6 2.7 2.7 + 2.2(n 2) 0.4 D-B6 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-B59W 0.8 2.9 2.9 + 2.2(n 2) 0.6 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-G59 0.6 2.8 2.8 + 2(n 2) 0.4 D-K59 6-14-6 7 Series NCM

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

8 10 TPH Polyolefin White, Black Red, Blue Yellow, Green 20 100 TPS Soft Polyolefin Features 2 For Blowing Series KP Clean One-touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.

HRX-OM-W069

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

100 Free flow 3.5 2.7 7 4 6 Effective area (mm2) 1.5 Note) Flow rate values are measured at 0.5 MPa and 20C.

CYP

F 12.5 25 G 6.5 8.5 H 45 75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23 39 HL 38.6 64.9 HP 44 73.5 HS 27 49.5 HT 19.5 39 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 Model +0.030 0 +0.030 0 CYP15 CYP32 LD 5.6 8.6 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 P M5 x 0.8 Rc 1/8 N 4.5 7.5 PA 25 50 PB 60 100 Q 105 138 QW 48 87 R 45 79.5 T 23 29 TA 13 17 TB 18 22 W 69 115 WA 32 46 WB 17 27 Y 2.5 3.5 Z 118 155 L 67 90 Model

CYPSeries

ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

CYPSeries

ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Use formula (2) for vane type sizes 50, 80, 100 and the rack-and-pinion type. P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

IDX-OM-W026

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

ASN Flow Rate and Sonic Conductance AQ ASV AS1001F AS2001F AS3001F AS2051F AS4001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D.

PF2D

Note 6) When the current output is selected.

30

Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal size Model Order number M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40

EX500-GEN2_eng

IP65 Enclosure rating 8 8 2 8 2 2 3 3 7 7 3 7 Operation: -10 to 50 oC, Storage: -20 to 60 oC (No condensation or freezing) Ambient temperature range 4 4 6 4 6 6 1 2 3 4 5 5 5 Operation, Storage: 35 to 85%RH (No condensation) Operating humidity range L IP address No corrosive gas Operating atmosphere 48 52 Setting 550 g Weight Description After maintenance is complete, perform appropriate

High Vacuum L Type Valve

30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

Clean Regulator

0 100 400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.