Vacuum Module Series ZX

ZCUK PV, V port size Electrical entry AMJ Nil Nil M5 x 0.8 M6 x 1 (Option) Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Y L C CL CN AMV Output specifications NPN Open collector 30 V 80 mA 15 AEP 55 PNP Open collector 30 V 80 mA HEP Vacuum pressure setting Related Caution Observe the following precautions when setting the vacuum pressure.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

(PNP) 2-wire IC circuit 5 V, 12 V 12 V Reed switch Solid state switch IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC 24 V Grommet Yes 12 V IC circuit Water resistance (2-color display) 5 V, 12 V 12 V IC circuit 3-wire (NPN equiv) Z76 No 5 V Yes Grommet Z73 Z80 100 V 100 V or less Relay, PLC 2-wire 24 V 12 V Lead wire length symbols: 0.5 m Nil (Example

Aluminum High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

LJ1H

With IO connector Top entry S R Cable entry Standard cable Robotic cable (flexible cable) direction Driver type F R L T B Left entry Axial Nil Without driver Cable length A1 A2 B1 B2 Right Pulse input type (Incremental encoder) 100 V Pulse input type (Incremental encoder) 200 V 2 5 Left Top 2 m 5 m Pulse input type (Absolute encoder) 100 V Pulse input type (Absolute encoder) 200 V Axial entry

MY1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example)Y59A 3 m L (Example)Y59AL 5 m Z (Example)Y59AZ Solid state switches marked with are produced upon receipt of order.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet 4/25/3 (A/BEA/EB) Double 5 V Single { } 3 V SJ P.108 SY3 20 0.65 SY Body ported Base mounted Body ported Base mounted SY5 20 2.4 SV SY7 20 3.3 SYJ SY9

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

AC Servo Motor Driver

Servo motor Servo amplifier (drive unit) Servo amplifier (drive unit) Driver Driver Servo motor U U U U V V M V M V W W W W Do not connect AC power directly to the servo motor. Otherwise, a fault may occur. A 6 CAUTION The surge absorbing diode installed to the DC relay for control output should be fitted in the specified direction.

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

5 Port Solenoid Valve

v v v v v N COM v v v v v v SI Unit output polarity EX500 Gateway Decentralized System 2 (128 points) EX500 Gateway Decentralized System (64 points) EtherNet/IP DeviceNet PROFIBUS DP EtherNet/IP Nil + COM v v v N COM v v v v SI Unit output polarity EX600 integrated-type (for I/O) serial transmission system (Fieldbus system) DeviceNetPROFIBUS DP CC-Link EtherCAT PROFINET EtherNet/IP Nil

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length (m) Load voltage Auto switch model Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC Perpendicular In-line 3-wire (NPN equivalent) IC circuit A76H 5 V Reed switch Solid state switch Grommet A72H A73H A72 A73 A73C 200 V 100 V Yes Relay, PLC 12 V 2-wire Connector 24 V Diagnostic

Fieldbus system EtherCAT compatible SI Unit

mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V +0.00 to +10.19 V +0.05 to +10.24 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V +0.00 to +5.09 V +0.03 to +5.12 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.09 V +0.78 to +5.12 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA +0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to

Thermo-chiller

Filter Rc1/2 20 m V V 3 Valve Rc1 V Rc1/2 V 4 Valve Rc1/2 V V 9 Y-strainer Rc3/8 #40 V V Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, select the particle filter, and then prepare it. Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

CJ2

(PNP) 2-wire 12 V Water resistant (2-color) Grommet Diagnostic output (2-color) IC circuit 5 V,12 V Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Solid state switches marked with are manufactured upon receipt of order.

LEC-OM07605CN

V DOCOM DOCOM RA RA (FR-BIF) (UVW)(UVW) U U U U V V M V M V W W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3

Fieldbus system EtherNet/IP compatible SI Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

Slider Type Ball Screw Drive/11-LEFS Series

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 11-LEFS25 V V V V V V V V V V V V 11-LEFS32 V V V V V V V V V V V V V V V V 11-LEFS40 V V V V V V V V V V V V V V V V V V Support Guide/LEFG Series

LEC-OM069xx

Positioning completed n.09 Speed feedforward 1 V/1000 min-1 n.0A Torque feedforward 1 V/100% rated torque n.0B Active gain *1 1st gain: 1 V 2nd gain: 2 V Gain type indicated by output voltage. n.0C Completion of position reference Completed: 5 V Not completed: 0 V Completion indicated by output voltage. n.0D External encoder speed 1 V/1000 min-1 Value at motor shaft *1.Refer to 5.8.1 Switching

NCQ8

A96V IC circuit Reed switch 5 V A96 Yes Grommet 2-wire IC circuit Relay, PLC A90V A93V A90 A93 100 V 5 V, 12 V 12 V 24 V No Yes *Solid state switches marked with a symbol are produced upon receipt of order. *39 in (1 m: M): Available in the D-M9W(V) only.