PFxx-OMX0002

pulse converted value setting pulse converted value PLS1_L U8 0 Y 0: 100 (L/pulse) 1: 1000 (L/pulse) OUT2 accumulated 1520 0x05F0 0 R/W 3000/6000 L range 0: 1 (L/pulse) 1: 10 (L/pulse) 12000 L range 0: 10 (L/pulse) 1: 100 (L/pulse) 1530 0x05FA 0 R/W PLS1_Ft3 U8 0 Y 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction

SQ1000/2000

L RUN SERIAL UNIT L ERR.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Modular F.R.L. Units

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

Hydraulic

Keeper plate Air release GA GB R J H 2-Rc P CDH9/f8 MM C D E e Width across flats G l 10 f Air release SS + Q + l + Stroke W W CX U +0.4 +0.1 NA T NB ZZ + Q + l + Stroke L K F S + Stroke MA B RR SS + Stroke A ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) l e CX J B C F GA GB NA NB P R S T CD RR SS L U W f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 38 16 32 15 37 31 3

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

LN LO M MN MO WO W L plug connector 3 M plug connector 220 VAC50/60Hz [230 VAC50/60Hz] 4 For type "W", DCvoltage is only available.

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

E-ITV-STD-RF-A

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

Air Cylinder Series MB

x 18 l 4 x 25 l 4 x 35 l CL1 MLGC Note) Cotter pins and flat washers are included.

AC

VBA200: Qb = 500 [l/min(ANR)] VBA400: Qb = 1100 [l/min(ANR)] Avoid pulsation Max. 0.05MPa NO VBA400 NO Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. L W Tc[s] = Select tank from table below.

SY

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

Electric Slide Tables

LES8R/L LESH8R/L LES8D LES16R/L LES16D LESH16R/L LESH16D LES25R/L LES25D LESH25R/L LESH25D M3 x 0.5 0.63 M4 x 0.7 1.5 When a cable duct or flexible moving tube is attached to the actuator, the sliding resistance of the table increases and may lead to operational failure of the product. L M5 x 0.8 3 16.

Digital Flow Switch (Integrated display type) ( compatible)

L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_2] Set value (OUT2) Page 44 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_2] Hysteresis (OUT2) Page 45 [ dtH2] Delay time setting at ON [ 0.00] 0.00 s Page 45 [ dtL2] Delay

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

•

G flats 12 .., ~ w w ,. u Rat with rib .. ~ 2 .5 B '--=-1 1/ ' Flat with rib ' 8 . 8 >; ~ \L~~~!

SYJ300/500/700

LN LO M MN MO WO W L plug connector 3 M plug connector 220 VAC50/60Hz [230 VAC50/60Hz] 4 For type "W", DCvoltage is only available.

Digital Flow Switch (Integrated display type) ( compatible)

min (4 L type) [008.0] 008.0 L/min (16 L type) [020.0] 020.0 L/min (40 L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_1] Set value (OUT1) Page 38 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_1] Hysteresis (OUT1) Page